×

Micromechanical resonating devices and related methods

  • US 8,638,179 B2
  • Filed: 12/20/2011
  • Issued: 01/28/2014
  • Est. Priority Date: 07/29/2008
  • Status: Active Grant
First Claim
Patent Images

1. An apparatus, comprising:

  • a suspended mechanical resonating structure; and

    a bias structure disposed proximate a first side of the suspended mechanical resonating structure and separated from the suspended mechanical resonating structure by a first gap,wherein the bias structure is configured to tune a resonance frequency of the suspended mechanical resonating structure by applying a bias to the suspended mechanical resonating structure,wherein the bias structure comprises a comb structure, andwherein the comb structure comprises a first, movable portion and a second, stationary portion.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×