MEMS mass-spring-damper systems using an out-of-plane suspension scheme
First Claim
Patent Images
1. A MEMS gyroscope, comprising:
- a. a proof mass having a horizontal planar dimension;
b. one or more anchors; and
c. one or more movable combs connected to the proof mass and to the one or more anchors by a plurality of suspensions;
d. wherein said plurality of suspensions are out-of-plane with the horizontal planar dimension of the proof mass and are perpendicular to the proof mass and at least one comb moves parallel to the proof mass.
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Abstract
MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.
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Citations
28 Claims
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1. A MEMS gyroscope, comprising:
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a. a proof mass having a horizontal planar dimension; b. one or more anchors; and c. one or more movable combs connected to the proof mass and to the one or more anchors by a plurality of suspensions; d. wherein said plurality of suspensions are out-of-plane with the horizontal planar dimension of the proof mass and are perpendicular to the proof mass and at least one comb moves parallel to the proof mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A quad-mass MEMS gyroscope, comprising:
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a. a plurality of proof masses, each having a horizontal planar dimension; b. one or more anchors; and c. one or more movable combs connected to the plurality of proof masses and to the one or more anchors by a plurality of suspensions; d. wherein said suspensions are out-of-plane with the horizontal planar dimension of said at least one of the proof masses and are perpendicular to the proof masses mass and at least one comb moves parallel to one of the proof masses. - View Dependent Claims (23, 24, 25)
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26. A MEMS mass-spring-damper system, comprising:
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a. at least one proof mass having a horizontal planar dimension; b. one or more anchors; and c. one or more movable structures connected to said at least one proof mass and to the one or more anchors by a plurality of suspensions; d. wherein said suspensions are out-of-plane with the horizontal planar dimension of at least one of the proof masses and are perpendicular to the proof mass and at least one movable structure moves parallel to the proof mass. - View Dependent Claims (27, 28)
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Specification