Strain gage and manufacturing method thereof
First Claim
Patent Images
1. A strain gage comprising:
- a strain sensitive element; and
a temperature compensation element,wherein the strain sensitive element and temperature compensation element are monolithically formed,wherein the temperature compensation element is configured by;
a first layer made of a first material, which is the same as a material of the strain sensitive element; and
a second layer made of a second material, which is a different from the first material, wherein the second layer is formed on the first layer.
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Abstract
A strain gage includes a strain sensitive element; and a temperature compensation element, wherein the strain sensitive element and temperature compensation element are monolithically formed. A method of manufacturing the strain gage includes: exposing and developing a strain sensitive element pattern and the temperature compensation element pattern; and etching the strain sensitive element pattern and the temperature compensation element pattern.
23 Citations
7 Claims
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1. A strain gage comprising:
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a strain sensitive element; and a temperature compensation element, wherein the strain sensitive element and temperature compensation element are monolithically formed, wherein the temperature compensation element is configured by; a first layer made of a first material, which is the same as a material of the strain sensitive element; and a second layer made of a second material, which is a different from the first material, wherein the second layer is formed on the first layer. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of manufacturing a strain gage, comprising the sequential steps of:
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producing a laminated sheet composed of a metal foil and a sheet-like resin material; applying and drying a first resist; exposing and developing a temperature compensation element pattern; depositing a film; peeling off the first resist; applying and drying a second resist; exposing and developing a strain sensitive element pattern and the temperature compensation element pattern; etching the strain sensitive element pattern and the temperature compensation element pattern; and peeling off the second resist.
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Specification