MEMS airflow sensor die incorporating additional circuitry on the die
First Claim
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1. A fluid flow sensor arrangement comprising:
- a micro electromechanical systems fabricated fluid flow sensor die having a fluid flow sensor;
a temperature sensor formed in available space on the die; and
a temperature compensation circuit formed in available space on the die and connected to the temperature sensor and to an output of the fluid flow sensor; and
wherein;
the output of the fluid flow sensor indicates a magnitude of a flow of fluid through the flow sensor; and
changes of the magnitude of the flow of fluid indicated at output of the flow sensor due to a temperature of the die are compensated with the temperature compensation circuit.
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Abstract
A MEMS airflow sensor die having a heater control circuit, differential instrumentation amplifier, temperature compensation, and/or offset correction circuitry integrated with an airflow sensor on the MEMS die. The added circuitry may be placed on space available on the basic airflow die with MEMS fabrication techniques without enlarging the sensor die. The die with the added circuitry may result in a device having a reduced form factor, improved reliability and lower cost.
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Citations
20 Claims
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1. A fluid flow sensor arrangement comprising:
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a micro electromechanical systems fabricated fluid flow sensor die having a fluid flow sensor; a temperature sensor formed in available space on the die; and a temperature compensation circuit formed in available space on the die and connected to the temperature sensor and to an output of the fluid flow sensor; and wherein; the output of the fluid flow sensor indicates a magnitude of a flow of fluid through the flow sensor; and changes of the magnitude of the flow of fluid indicated at output of the flow sensor due to a temperature of the die are compensated with the temperature compensation circuit. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A fluid flow sensor die comprising:
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a given micro electromechanical systems fabricated fluid flow sensor die having a flow sensor; and an amplifier added to the flow sensor die; and wherein; the amplifier is formed on the flow sensor die with micro electromechanical systems fabrication techniques; and the amplifier is connected to an output of the flow sensor. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A fluid flow sensor system comprising:
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a micro electromechanical systems fabricated flow sensor die having a fluid flow sensor; and a heater control circuit formed on the flow sensor die with micro electromechanical systems fabrication techniques. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification