Gate valve

• US 8,641,014 B2
• Filed: 09/06/2011
• Issued: 02/04/2014
• Est. Priority Date: 09/10/2010
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: White, John M.
• Primary Examiner(s): Fristoe, Jr., John K
• Assistant Examiner(s): DO, HAILEY KYUNG AE
• Application Number:
  US13/225,871
• Publication Number:
  US 20120061605A1
• Time in Patent Office: 882 Days
• Field of Search: 251/167, 251/175, 251/196, 251/197, 251/199, 251/200, 251/282, 251326-329, 138 42- 46
• US Class Current: 251/175
• CPC Class Codes: F16K 3/188 by means of hydraulic forces
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

In one embodiment, a gate valve is provided that includes a seal plate disposed in a housing. An inflatable biasing member is retained on a first side of the seal plate and is positioned to surround a first opening formed through the housing. A ring seal is retained on a second side of the plate opposite the first side and is positioned to surround a second opening formed through the housing. At least one of the inflatable biasing member and the ring seal are adapted to create a vacuum seal around the first and second openings, respectively, when the inflatable biasing member is inflated.

Claims

1. A gate valve, comprising:

a housing having first and second aligned openings formed therethrough, the openings sized to accommodate robotic transfer of a substrate;

a base plate disposed in the housing and having a first side and a second side, the base plate movable between positions adjacent and clear of the openings;

an inflatable biasing member retained on the first side of the plate and sized to surround the first opening, the inflatable biasing member configured to contact the housing when inflated; and

a ring seal retained on the second side of the plate and sized to surround the second opening, wherein the inflatable biasing member and the ring seal are adapted to create a vacuum seal around the first and the second openings, respectively, when the inflatable biasing member is inflated, and wherein the inflatable biasing member does not extend inwardly of bounds of the first opening and the seal does not extend inwardly of the second opening.

2. The gate valve of claim 1, wherein the housing comprises a plurality of by-pass grooves formed in a wall of the housing.

3. The gate valve of claim 1, wherein the inflatable biasing member comprises by-pass notches protruding from a surface thereof.

4. The gate valve of claim 1, wherein the base plate includes a first groove formed in the first side thereof, and wherein the inflatable biasing member is retained within the first groove.

5. The gate valve of claim 4, wherein the base plate includes a second groove formed in the second side thereof, and wherein the ring seal is retained within second groove.

6. The gate valve of claim 1, further comprising one or more shafts coupled to the base plate.

7. The gate valve of claim 6, further comprising a fluid line disposed through one of the one or more shafts and in fluid communication with the inflatable biasing member.

8. The gate valve of claim 6, wherein each of the one or more shafts extend through an opening formed in a lower housing closure of the housing.

9. The gate valve of claim 8, further comprising bellows disposed between the one or more shafts and each of the openings formed in the lower housing closure.

10. A gate valve, comprising:

a housing having first and second aligned openings formed therethrough, the openings sized to accommodate robotic transfer of a substrate;

a base plate disposed in the housing and having a first side and a second side;

one or more shafts coupled to the base plate;

one or more actuators coupled to the one or more shafts, the one or more actuators operable to move the base plate between positions adjacent and clear of the openings;

an inflatable biasing member retained on the first side of the plate and sized to surround the first opening, the inflatable biasing member configured to contact the housing when inflated; and

a ring seal retained on the second side of the plate and sized to surround the second opening, wherein the inflatable biasing member and the ring seal are adapted to create a vacuum seal around the first and second openings, respectively, when the inflatable biasing member is inflated, and wherein the inflatable biasing member does not extend inwardly of bounds of the first opening and the seal does not extend inwardly of the second opening.

11. The gate valve of claim 10, wherein the base plate includes a first groove formed in the first side thereof, and wherein the inflatable biasing member is retained within the first groove.

12. The gate valve of claim 11, wherein the base plate includes a second groove formed in the second side thereof, and wherein the ring seal is retained within second groove.

13. The gate valve of claim 12, wherein the inflatable biasing member comprises by-pass notches protruding from a surface thereof.

14. The gate valve of claim 12, wherein the housing comprises a plurality of by-pass grooves formed in a wall of the housing.

15. The gate valve of claim 12, wherein the one or more shafts is two shafts.

16. The gate valve of claim 15, further comprising a fluid line disposed through one of the two shafts and in fluid communication with the inflatable biasing member.

17. A gate valve, comprising:

a housing having first and second aligned openings formed therethrough, the openings sized to accommodate robotic transfer of a substrate;

a base plate disposed in the housing and having a first side and a second side, the base plate movable between positions adjacent and clear of the openings;

one or more shafts pivotably coupled to the base plate;

an inflatable biasing member retained on the first side of the base plate and sized to surround the first opening, the inflatable biasing member configured to contact the housing when inflated; and

a ring seal retained on the second side of the base plate and sized to surround the second opening, wherein the inflatable biasing member and the ring seal are adapted to create a vacuum seal around the first and second openings, respectively, when the inflatable biasing member is inflated, and wherein the inflatable biasing member does not extend inwardly of bounds of the first opening and the seal does not extend inwardly of the second opening.

18. The gate valve of claim 17, further comprising a fluid line disposed through one shafts and in fluid communication with the inflatable biasing member.

19. The gate valve of claim 17, wherein the one or more shafts are two shafts, and wherein the housing comprises a third opening and fourth opening through which the two shafts are disposed.

20. The gate valve of claim 19, further comprising a first set of bellows disposed around one of the two shafts and the third opening, and a second set of bellows disposed around the other of the two shafts and the fourth opening.