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Suspended beam for use in MEMS device

  • US 8,643,140 B2
  • Filed: 07/11/2011
  • Issued: 02/04/2014
  • Est. Priority Date: 07/11/2011
  • Status: Expired due to Fees
First Claim
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1. A suspended beam, comprising:

  • a substrate;

    a main body, wherein a first end of the main body is fixed onto the substrate, and a second end of the main body is suspended; and

    a first metal line structure embedded in the main body and enclosing a portion of the main body, wherein the first metal line structure has a width smaller than a width of the main body.

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