Femtosecond laser processing system with process parameters controls and feedback
First Claim
Patent Images
1. A system, comprising:
- a fiber-based source of ultrashort laser pulses, said fiber-based source comprising at least one fiber amplifier, wherein said fiber-based source comprises an adjustable grating compressor to compress optical pulses, said grating compressor operatively connected to said controller to align said grating compressor;
a controller to control said fiber-based source; and
a beam manipulator to monitor one or more pulse characteristics of said laser pulses and to generate feedback data for said controller,wherein said pulse characteristics comprise an output power, a pulse energy, a pulse width, a wavelength, a repetition rate, a polarization, a temporal delay, a temporal phase, a spatial phase, or a combination thereof,wherein said controller receives signals representative of said one or more pulse characteristics and generates control signals to vary at least one of said pulse characteristics, said controller being networked to at least one computing means via a physical link and/or wireless link.
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Abstract
A femtosecond laser based laser processing system having a femtosecond laser, frequency conversion optics, beam manipulation optics, target motion control, processing chamber, diagnostic systems and system control modules. The femtosecond laser based laser processing system allows for the utilization of the unique heat control in micromachining, and the system has greater output beam stability, continuously variable repetition rate and unique temporal beam shaping capabilities.
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Citations
28 Claims
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1. A system, comprising:
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a fiber-based source of ultrashort laser pulses, said fiber-based source comprising at least one fiber amplifier, wherein said fiber-based source comprises an adjustable grating compressor to compress optical pulses, said grating compressor operatively connected to said controller to align said grating compressor; a controller to control said fiber-based source; and a beam manipulator to monitor one or more pulse characteristics of said laser pulses and to generate feedback data for said controller, wherein said pulse characteristics comprise an output power, a pulse energy, a pulse width, a wavelength, a repetition rate, a polarization, a temporal delay, a temporal phase, a spatial phase, or a combination thereof, wherein said controller receives signals representative of said one or more pulse characteristics and generates control signals to vary at least one of said pulse characteristics, said controller being networked to at least one computing means via a physical link and/or wireless link. - View Dependent Claims (2)
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3. A system, comprising:
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a fiber-based source of ultrashort laser pulses, said fiber-based source comprising at least one fiber amplifier, wherein said fiber-based source of ultrashort pulses comprises an automatically adjustable grating compressor to compress optical pulses, said automatically adjustable grating compressor operatively connected to said controller to control a pulse duration of said ultrashort pulses; a controller to control said fiber-based source; and a beam manipulator to monitor one or more pulse characteristics of said laser pulses and to generate feedback data for said controller, wherein said pulse characteristics comprise an output power, a pulse energy, a pulse width, a wavelength, a repetition rate, a polarization, a temporal delay, a temporal phase, a spatial phase, or a combination thereof, wherein said controller receives signals representative of said one or more pulse characteristics and generates control signals to vary at least one of said pulse characteristics, said controller being networked to at least one computing means via a physical link and/or wireless link. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A system, comprising:
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a fiber-based source of ultrashort laser pulses, said fiber-based source comprising at least one fiber amplifier; a controller to control said fiber-based source; and a beam manipulator to monitor one or more pulse characteristics of said laser pulses and to generate feedback data for said controller, wherein said pulse characteristics comprise an output power, a pulse energy, a pulse width, a wavelength, a repetition rate, a polarization, a temporal delay, a temporal phase, a spatial phase, or a combination thereof, wherein said controller receives signals representative of said one or more pulse characteristics and generates control signals to vary at least one of said pulse characteristics, said controller being networked to at least one computing means via a physical link and/or wireless link wherein said fiber-based source, said controller, and said beam manipulator are arranged as a portion of a laser-based material processing system for processing of target material, and provides for active control of processing parameters, wherein at least a portion of said beam manipulator is disposed downstream from said fiber-based source, and said laser processing system is configured such that operation of sub-components therein is individually or cooperatively adjustable with said controller and said beam manipulator. - View Dependent Claims (18, 19, 20, 21, 22)
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23. A system, comprising:
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a fiber-based source of ultrashort laser pulses, said fiber-based source comprising at least one fiber amplifier; a controller to control said fiber-based source; and a beam manipulator to monitor one or more pulse characteristics of said laser pulses and to generate feedback data for said controller, wherein said pulse characteristics comprise an output power, a pulse energy, a pulse width, a wavelength, a repetition rate, a polarization, a temporal delay, a temporal phase, a spatial phase, or a combination thereof, wherein said controller receives signals representative of said one or more pulse characteristics and generates control signals to vary at least one of said pulse characteristics, said controller being networked to at least one computing means via a physical link and/or wireless link, wherein said fiber-based source, said controller, and said beam manipulator are arranged as a portion of a laser-based material processing system for processing of target material, and provides for active control of processing parameters, said laser processing system comprising a tool monitoring a condition of the target material, said tool for spectroscopic analysis of light generated during laser ablation with ultrashort pulses, and wherein a pulse characteristic is modified by said controller based on a result obtained from said spectroscopic analysis.
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24. A system, comprising:
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a fiber-based source of ultrashort laser pulses, said fiber-based source comprising at least one fiber amplifier; a controller to control said fiber-based source; and a beam manipulator to monitor one or more pulse characteristics of said laser pulses and to generate feedback data for said controller, wherein said pulse characteristics comprise an output power, a pulse energy, a pulse width, a wavelength, a repetition rate, a polarization, a temporal delay, a temporal phase, a spatial phase, or a combination thereof, wherein said controller receives signals representative of said one or more pulse characteristics and generates control signals to vary at least one of said pulse characteristics, said controller being networked to at least one computing means via a physical link and/or wireless link, wherein said fiber-based source, said controller, and said beam manipulator are arranged as a portion of a laser-based material processing system for processing of target material, and provides for active control of processing parameters, wherein said laser-based material processing system is configured to weld a material transparent at a wavelength of said fiber-based source, and with high repetition rate femtosecond laser pulses generated at a repetition rate in the range from 10 kHz to 50 MHz so as to allow for accumulation of heat from pulse-to-pulse. - View Dependent Claims (25, 26, 27, 28)
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Specification