Semiconductor device, electronic device, and method of manufacturing semiconductor device

• US 8,648,346 B2
• Filed: 09/23/2011
• Issued: 02/11/2014
• Est. Priority Date: 01/28/2005
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Isa, Toshiyuki, Morisue, Masafumi, Kawamata, Ikuko
• Primary Examiner(s): Tran, Thien F
• Application Number:
  US13/241,577
• Publication Number:
  US 20120012846A1
• Time in Patent Office: 872 Days
• Field of Search: None
• US Class Current: 257/59
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1285 using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors
• CPC Class Codes: H01L 27/1292 using liquid deposition, e.g. printing
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H10K 71/611 using printing deposition, e.g. ink jet printing

Abstract

To provide a semiconductor device and a display device which can be manufactured through a simplified process and the manufacturing technique. Another object is to provide a technique by which a pattern of wirings or the like which is partially constitutes a semiconductor device or a display device can be formed with a desired shape with controllability.

Claims

1. A semiconductor device comprising:

a thin film transistor,

wherein the thin film transistor comprises;

a first conductive layer;

an insulating layer over the first conductive layer;

a semiconductor layer over the insulating layer;

a second conductive layer over the semiconductor layer; and

a third conductive layer over the semiconductor layer,

wherein the semiconductor layer comprises a region, wherein the region overlaps with the first conductive layer and does not overlap with the second conductive layer and the third conductive layer, and

wherein the region meanders.

2. The semiconductor device according to claim 1, further comprising a pixel electrode electrically connected to the thin film transistor.

3. The semiconductor device according to claim 1, wherein the first conductive layer meanders.

4. The semiconductor device according to claim 1, wherein each of the second conductive layer and the third conductive layer meanders.

5. The semiconductor device according to claim 1,

wherein each of the second conductive layer and the third conductive layer comprises a plurality of projections, and

wherein the plurality of projections of the second conductive layer engage with the plurality of projections of the third conductive layer.

6. The semiconductor device according to claim 1, wherein the first conductive layer comprises an element selected from the group consisting of Ag (silver), Au (gold), Ni (nickel), Pt (platinum), Pd (palladium), Ir (iridium), Rh (rhodium), Ta (tantalum), W (tungsten), Ti (titanium), Mo (molybdenum), Al (aluminum), and Cu (copper), or an alloy comprising the element.

7. The semiconductor device according to claim 1, wherein the each of the second conductive layer and the third conductive layer comprises an element selected from the group consisting of Ag (silver), Au (gold), Cu (copper), W (tungsten), Al (aluminum), and Mo (molybdenum).

8. The semiconductor device according to claim 1, further comprising an antenna.

9. The semiconductor device according to claim 1, wherein the semiconductor layer comprises an amorphous silicon.

10. The semiconductor device according to claim 1, wherein at least one of the first conductive layer, the second conductive layer, and the third conductive layer is formed by a droplet discharge method.

11. The semiconductor device according to claim 1, further comprising:

a protective circuit electrically connected to the thin film transistor.

12. An electronic book comprising the semiconductor device according to claim 1.

13. An electronic book comprising the semiconductor device according to claim 1.

14. A semiconductor device comprising:

a first conductive layer that extends to a first direction;

a semiconductor layer adjacent to the first conductive layer;

an insulating layer interposed between the first conductive layer and the semiconductor layer;

a second conductive layer adjacent to the semiconductor layer, wherein the second conductive layer partially overlaps with the first conductive layer, and wherein the second conductive layer comprises a first convex portion that is oriented in a second direction intersecting with the first direction, a second convex portion that is oriented in a third direction intersecting with the first direction, and a third convex portion that is oriented in a fourth direction intersecting with the first direction; and

a third conductive layer adjacent to the semiconductor layer, wherein the third conductive layer partially overlaps with the first conductive layer, and wherein the third conductive layer comprises a fourth convex portion that is oriented in a fifth direction intersecting with the first direction, a fifth convex portion that is oriented in a sixth direction intersecting with the first direction, and a sixth convex portion that is oriented in a seventh direction intersecting with the first direction,

wherein the second convex portion is interposed between the fourth convex portion and the fifth convex portion,

wherein the third convex portion is interposed between the fifth convex portion and the sixth convex portion,

wherein the fourth convex portion is interposed between the first convex portion and the second convex portion, and

wherein the fifth convex portion is interposed between the second convex portion and the third convex portion.

15. The semiconductor device according to claim 14, wherein the third conductive layer is electrically connected to a pixel electrode.

16. The semiconductor device according to claim 14, wherein at least one of the first conductive layer, the second conductive layer, and the third conductive layer meanders.

17. The semiconductor device according to claim 14, wherein the first conductive layer comprises an element selected from the group consisting of Ag (silver), Au (gold), Ni (nickel), Pt (platinum), Pd (palladium), Ir (iridium), Rh (rhodium), Ta (tantalum), W (tungsten), Ti (titanium), Mo (molybdenum), Al (aluminum), and Cu (copper), or an alloy comprising the element.

18. The semiconductor device according to claim 14, wherein the each of the second conductive layer and the third conductive layer comprises an element selected from the group consisting of Ag (silver), Au (gold), Cu (copper), W (tungsten), Al (aluminum), and Mo (molybdenum).

19. The semiconductor device according to claim 14, wherein at least one of the first conductive layer, the second conductive layer, and the third conductive layer is formed by a droplet discharge method.

20. The semiconductor device according to claim 14, wherein the semiconductor layer comprises an amorphous silicon.

21. An electronic book comprising the semiconductor device according claim 14.

22. A semiconductor device comprising:

a thin film transistor,

wherein the thin film transistor comprises;

a gate electrode layer that extends to a first direction;

a semiconductor layer over the gate electrode layer;

a gate insulating layer interposed between the gate electrode layer and the semiconductor layer;

a source electrode layer over the semiconductor layer, wherein the source electrode layer comprises a first convex portion that is oriented in a second direction perpendicular to the first direction, a second convex portion that is oriented in a third direction perpendicular to the first direction, and a third convex portion that is oriented in a fourth direction perpendicular to the first direction; and

a drain electrode layer over the semiconductor layer, wherein the drain electrode layer comprises a fourth convex portion that is oriented in a fifth direction perpendicular to the first direction, a fifth convex portion that is oriented in a sixth direction perpendicular to the first direction, and a sixth convex portion that is oriented in a seventh direction perpendicular to the first direction,

wherein the second convex portion is interposed between the fourth convex portion and the fifth convex portion,

wherein the third convex portion is interposed between the fifth convex portion and the sixth convex portion,

wherein the fourth convex portion is interposed between the first convex portion and the second convex portion, and

wherein the fifth convex portion is interposed between the second convex portion and the third convex portion.

23. The semiconductor device according to claim 22, wherein one of the source electrode layer and the drain electrode layer is electrically connected to a pixel electrode.

24. The semiconductor device according to claim 22, wherein at least one of the gate electrode layer, the source electrode layer, and the drain electrode layer meanders.

25. The semiconductor device according to claim 22, wherein the gate electrode layer comprises an element selected from the group consisting of Ag (silver), Au (gold), Ni (nickel), Pt (platinum), Pd (palladium), Ir (iridium), Rh (rhodium), Ta (tantalum), W (tungsten), Ti (titanium), Mo (molybdenum), Al (aluminum), and Cu (copper), or an alloy comprising the element.

26. The semiconductor device according to claim 22, wherein the each of the source electrode layer and the drain electrode layer comprises an element selected from the group consisting of Ag (silver), Au (gold), Cu (copper), W (tungsten), Al (aluminum), and Mo (molybdenum).

27. The semiconductor device according to claim 22, wherein at least one of the gate electrode layer, the source electrode layer, and the drain electrode layer is formed by a droplet discharge method.

28. The semiconductor device according to claim 22, wherein the semiconductor layer comprises an amorphous silicon.

29. An electronic book comprising the semiconductor device according to claim 22.