Oscillator having a plurality of switchable MEMS vibrators
First Claim
1. An oscillator comprising:
- a plurality of MEMS vibrators each having a first terminal and a second terminal, and having respective resonant frequencies different from each other;
an amplifier circuit having an input terminal and an output terminal;
a connection circuit adapted to connect the first terminal of one of the MEMS vibrators and the input terminal to each other, and the second terminal of the one of the MEMS vibrators and the output terminal to each other to thereby connect the one of the MEMS vibrators and the amplifier circuit to each other;
a signal reception terminal adapted to receive a switching signal used to switch a state of the connection circuit; and
a switching circuit adapted to make the connection circuit switch the MEMS vibrator to be connected to the amplifier circuit based on the switching signal,wherein the MEMS vibrators are housed in an inside of a cavity,the signal reception terminal is disposed outside the cavity, andthe connection circuit connects the first terminal and the second terminal of the MEMS vibrator, which fails to be connected to the amplifier circuit, to a first reference potential.
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Accused Products
Abstract
An oscillator includes: a plurality of MEMS vibrators each having a first terminal and a second terminal, and having respective resonant frequencies different from each other; an amplifier circuit having an input terminal and an output terminal; a connection circuit adapted to connect the first terminal of one of the MEMS vibrators and the input terminal to each other, and the second terminal of the one of the MEMS vibrators and the output terminal to each other; a signal reception terminal adapted to receive a switching signal used to switch a state of the connection circuit; and a switching circuit adapted to make the connection circuit switch the MEMS vibrator to be connected to the amplifier circuit based on the switching signal, wherein the MEMS vibrators are housed in an inside of a cavity, and the signal reception terminal is disposed outside the cavity.
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Citations
6 Claims
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1. An oscillator comprising:
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a plurality of MEMS vibrators each having a first terminal and a second terminal, and having respective resonant frequencies different from each other; an amplifier circuit having an input terminal and an output terminal; a connection circuit adapted to connect the first terminal of one of the MEMS vibrators and the input terminal to each other, and the second terminal of the one of the MEMS vibrators and the output terminal to each other to thereby connect the one of the MEMS vibrators and the amplifier circuit to each other; a signal reception terminal adapted to receive a switching signal used to switch a state of the connection circuit; and a switching circuit adapted to make the connection circuit switch the MEMS vibrator to be connected to the amplifier circuit based on the switching signal, wherein the MEMS vibrators are housed in an inside of a cavity, the signal reception terminal is disposed outside the cavity, and the connection circuit connects the first terminal and the second terminal of the MEMS vibrator, which fails to be connected to the amplifier circuit, to a first reference potential. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification
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- Resources
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Current AssigneeSeiko Epson Corporation (Seiko Group)
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Original AssigneeSeiko Epson Corporation (Seiko Group)
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InventorsYajima, Aritsugu
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Primary Examiner(s)Gannon, Levi
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Application NumberUS13/444,144Publication NumberTime in Patent Office671 DaysField of Search310/342, 327/298, 331/46, 331/49, 331/56, 331/116.FE, 331/116.M, 331/116.R, 331/154, 331/158, 331/162, 331/179, 333/189, 333197-199US Class Current331/162CPC Class CodesH03B 2200/0012 Pierce oscillatorH03B 2200/0048 including measures to switc...H03B 5/30 with frequency-determining ...H03B 5/364 the amplifier comprising fi...
