Quadrature compensation for a rotation-rate sensor
First Claim
1. A rotation-rate sensor comprising:
- a substrate having a surface;
a movable element situated above the surface, that is deflectable, based on a Coriolis force, along a first axis running perpendicular to the surface, the movable element including at least one first electrode surrounding a recessed insulating region in the movable element;
a driving device for activating the movable element along a second axis that runs parallel to the surface;
a compensation device including a plurality of second electrodes and a current supply supplying a voltage to at least one of the second electrodes, wherein at least one of the second electrodes overlaps the at least one first electrode in a direction of the first axis by a degree that varies as a function of a deflection of the movable element along the second axis and the current supply applies a corrective voltage to the at least one second electrode to compensate for a deflection of the movable element along the first axis due to a change in position of the movable element along the second axis; and
first and second spring elements connecting respective first and second opposing edges of the movable element to at least one drive mass of the driving device, the first and second spring elements each including at least one flexure portion extending substantially parallel to the respective first or second opposing edge,wherein the at least one first electrode of the movable element surrounds first and second pluralities of the recessed insulating regions, the first and second pluralities of recessed insulating regions each arranged in a linear grouping aligned with and proximate to a respective one of the first and second opposing edges.
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Accused Products
Abstract
A rotation-rate sensor includes a substrate having a surface, a movable element situated above the surface, which is deflectable based on a Coriolis force along a first axis that runs perpendicular to the surface, a driving device which is prepared to activate the movable element along a second axis that runs parallel to the surface, a compensation device, in order to generate an electrostatic force along the first axis, including electrodes corresponding to one another, developed on the substrate and on the movable element; a relative degree of covering of the electrodes in the direction of the first axis being a function of the deflection of the movable element along the second axis; and the electrode developed on the movable element runs around an insulating region of the movable element.
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Citations
9 Claims
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1. A rotation-rate sensor comprising:
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a substrate having a surface; a movable element situated above the surface, that is deflectable, based on a Coriolis force, along a first axis running perpendicular to the surface, the movable element including at least one first electrode surrounding a recessed insulating region in the movable element; a driving device for activating the movable element along a second axis that runs parallel to the surface; a compensation device including a plurality of second electrodes and a current supply supplying a voltage to at least one of the second electrodes, wherein at least one of the second electrodes overlaps the at least one first electrode in a direction of the first axis by a degree that varies as a function of a deflection of the movable element along the second axis and the current supply applies a corrective voltage to the at least one second electrode to compensate for a deflection of the movable element along the first axis due to a change in position of the movable element along the second axis; and first and second spring elements connecting respective first and second opposing edges of the movable element to at least one drive mass of the driving device, the first and second spring elements each including at least one flexure portion extending substantially parallel to the respective first or second opposing edge, wherein the at least one first electrode of the movable element surrounds first and second pluralities of the recessed insulating regions, the first and second pluralities of recessed insulating regions each arranged in a linear grouping aligned with and proximate to a respective one of the first and second opposing edges. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification