Electrostatically coupled pressure sensor
First Claim
Patent Images
1. A sensor comprising:
- a housing having at least one wall;
a cantilever element disposed within the housing, wherein a first end of the cantilever element is affixed to the at least one wall, and wherein a portion of the cantilever element is coupled to an output portion of the sensor; and
a membrane configured to exert an electrostatic force on the cantilever element to cause the cantilever element to move in response to pressure exerted on the membrane.
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Abstract
A disclosed pressure-responsive sensor includes a flexible element contained within an enclosure and a membrane configured to exert an electrostatic force on the flexible element to cause the flexible element to respond to pressure variations on the membrane. A disclosed pressure-sensing method includes electrostatically coupling a membrane to a flexible element contained within an enclosure to transfer a pressure response of the membrane to the flexible element. Motion of the flexible element is converted into a pressure signal.
45 Citations
20 Claims
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1. A sensor comprising:
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a housing having at least one wall; a cantilever element disposed within the housing, wherein a first end of the cantilever element is affixed to the at least one wall, and wherein a portion of the cantilever element is coupled to an output portion of the sensor; and a membrane configured to exert an electrostatic force on the cantilever element to cause the cantilever element to move in response to pressure exerted on the membrane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method, comprising:
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towing a geophysical survey system that includes one or more sensors behind a vessel in a body of water, wherein at least one of the one or more sensors includes a cantilever member and a flexible membrane; the flexible membrane receiving an external force; in response to the received external force, the flexible membrane exerting an electrostatic force on the cantilever member; the cantilever member departing from an equilibrium position; and the at least one sensor outputting a signal indicative of a motion of the cantilever member. - View Dependent Claims (11, 12, 13, 14)
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15. An apparatus, comprising:
a seismic streamer cable having a first sensor that includes; a sensing element and an output element; wherein the sensing element includes a cantilever member and a membrane, wherein the membrane is configured, in response to a force exerted on the membrane, to cause a change in position of the cantilever member, wherein the change in position is indicative of an electrostatic force exerted by the membrane on the cantilever member; and wherein the output element is configured to output a signal indicative of the force. - View Dependent Claims (16, 17, 18, 19, 20)
Specification