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Chemically sensitive sensor with lightly doped drains

  • US 8,653,567 B2
  • Filed: 06/30/2011
  • Issued: 02/18/2014
  • Est. Priority Date: 07/03/2010
  • Status: Active Grant
First Claim
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1. A chemically sensitive sensor, comprising:

  • a floating gate electrically coupled to a gate electrode on a substrate;

    a drain terminal connection;

    a source terminal connection;

    a pair of electrodes formed on the substrate and one electrode of the pair on either side of the gate electrode;

    a pair of doped regions in the substrate, one of the pair of doped regions including a lightly doped region and a highly doped region, wherein the lightly doped region extends beneath a respective one of the electrodes and the highly doped region of each pair extends to couple respectively with the drain terminal and the source terminal.

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