Scheduler, substrate processing apparatus, and method of transferring substrates in substrate processing apparatus

• US 8,655,472 B2
• Filed: 01/11/2011
• Issued: 02/18/2014
• Est. Priority Date: 01/12/2010
• Status: Active Grant

• Current Assignee: Ebara Corporation
• Original Assignee: Ebara Corporation
• Inventors: Oishi, Kunio, Kobayashi, Yoichi, Koizumi, Ryuya
• Primary Examiner(s): Ali, Mohammad
• Assistant Examiner(s): Booker, Kelvin
• Application Number:
  US13/004,208
• Publication Number:
  US 20110172800A1
• Time in Patent Office: 1,134 Days
• Field of Search: 700/100, 700/121, 700/149, 700/229
• US Class Current: 700/121
• CPC Class Codes: G05B 19/41865 characterised by job scheduling, process planning, material flow
• CPC Class Codes: G05B 2219/45031 Manufacturing semiconductor wafers
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A scheduler generates not only normal substrate transferring schedules for substrates newly supplied to a substrate processing apparatus, but also substrate transferring schedules for keeping a high production quantity in the event of a failure. The scheduler is used in a substrate processing apparatus including a plurality of substrate processing sections for processing substrates, a transfer device for transferring the substrates, and a controller for controlling the substrate processing units to process the substrates and controlling the transfer device to transfer the substrates. The scheduler is incorporated in the controller for calculating a substrate transferring schedule and has a function to successively calculate substrate transferring schedules for substrates which are newly supplied to the substrate processing apparatus, and, in the event of a fault occurring in the substrate processing apparatus, to recalculate the substrate transferring schedules with an initial state represented by a state including the fault.

Claims

1. A scheduler for use in a substrate processing apparatus including a plurality of substrate processing sections for processing substrates, a transfer section for transferring the substrates, and a controller for controlling the substrate processing sections to process the substrates and controlling the transfer section to transfer the substrates, the scheduler being adapted to be incorporated in the controller for calculating a substrate transferring schedule, the scheduler comprising:

a function to successively calculate substrate transferring schedules for substrates which are newly supplied to the substrate processing apparatus;

a function, in an event of a fault occurring in the substrate processing apparatus and a state of the fault being taken as an initial state, to calculate the substrate transferring schedules which remove a substrate from one of the substrate processing sections which suffers the fault, and transfers the removed substrate to another one of the processing sections which is normal to continuously process the removed substrate, or retrieve the removed substrate and place it into a substrate cassette after the removed substrate is washed with water and dried; and

a function to recalculate the substrate transferring schedules which makes the one of the substrate processing sections which suffers the fault unusable and supply new substrates to the substrate processing apparatus.

2. A scheduler according to claim 1, wherein in the event of the fault, the substrate transferring schedules are calculated by a transferring simulation process.

3. A scheduler according to claim 2, wherein the transferring simulation process generates a substrate transferring schedules to achieve a target throughput by using setting values optimized when the substrate processing apparatus has been designed, with respect to parameters representing priority of the substrate transferring schedules of the newly supplied substrates over supplied substrates which are transferred according to substrate transferring schedules generated by a previous transferring scheduling sequence, and also representing allowable delay times for delays caused in the transferring of supplied substrates by interrupts caused by the newly supplied substrates.

4. A scheduler according to claim 1, wherein the substrate transferring schedules are calculated to carry out a process under conditions set respectively for the substrates to achieve at least a target processing throughput while satisfying a prescribed process limiting condition when the substrates are applied to the substrate processing apparatus.

5. A scheduler according to claim 1, wherein the substrate transferring schedules are scheduled to satisfy a process limiting condition with respect to all processes on the substrates newly supplied to the substrate processing apparatus, processes downstream of one of the substrate processing sections which start retrieving the substrate to be retrieved, and all processes on substrates whose substrate transferring schedules have been generated by a previous or earlier substrate supplying scheduling sequence.

6. A scheduler according to claim 1, wherein a substrate transferring schedule for supplying a new substrate is generated by the linear programming process, and a substrate transferring schedule for retrieving a substrate to be retrieved is generated by the transferring simulation process when malfunctions of substrate processing apparatus or continuing a process on a substrate.

7. A scheduler according to claim 6, wherein the malfunctions of substrate processing apparatus include a production resumption after the substrate processing apparatus has shut down, a dynamic switching process of unit use and nonuse, or process failure occurrence.

8. A scheduler according to claim 6, wherein a substrate is transferred by a substrate transferring schedule generated by the transferring simulation process after the substrate processing apparatus suffers a malfunction, and thereafter when the substrate processing apparatus recovers a normal state from the malfunction, a substrate is transferred again by a substrate transferring schedule generated by the linear programming process.

9. A scheduler according to claim 6, wherein when a transferring simulation process switches from a linear programming process or a linear programming process switches from a transferring simulation process, a substrate transferring schedule which has been scheduled and substrate process condition data at the time of switching are transferred to a scheduler in which the transferring simulation process or the linear programming process has switched.

10. A substrate processing apparatus comprising:

a plurality of substrate processing sections for processing substrates;

a transfer section for transferring the substrates;

a controller for controlling the substrate processing sections to process the substrates and controlling the transfer section to transfer the substrates; and

a scheduler according to claim 1, the scheduler being incorporated in the controller.

11. A substrate transferring method for a substrate processing apparatus including a plurality of substrate processing sections for processing substrates, a transfer section for transferring the substrates, and a controller for controlling the substrate processing sections to process the substrates and controlling the transfer section to transfer the substrates, the method comprising:

successively calculating substrate transferring schedules for substrates which are newly supplied to the substrate processing apparatus;

in an event of a fault occurring in the substrate processing apparatus, the state of the fault being taken as an initial state, calculating the substrate transferring schedules which remove a substrate from one of the substrate processing sections which suffers the fault, and transfer the removed substrate to another one of the processing sections which is normal to continuously process the removed substrate, or retrieve the removed substrate and place into a substrate cassette after the removed substrate is washed with water and dried; and

recalculating the substrate transferring schedules which makes the one of the substrate processing sections which suffers the fault unusable and supplies new substrates to the substrate processing apparatus.

12. A substrate transferring method according to claim 11, wherein the substrate transferring schedules are calculated by a transferring simulation process which has switched from a linear programming process or a linear programming process which has switched from a transferring simulation process.

13. A substrate transferring method according to claim 11, wherein a substrate transferring schedule for supplying a new substrate is generated by the linear programming process and a substrate is transferred by the generated substrate transferring schedule, and wherein when a malfunction of the substrate processing apparatus is detected, the generated substrate transferring schedule switches to a substrate transferring schedule generated by the transferring simulation process, and a substrate transferring schedule for retrieving a substrate to be retrieved or continuing a process on a substrate and transferring a supplied substrate is generated, and a substrate is transferred by the generated substrate transferring schedule.

14. A substrate transferring method according to claim 11, wherein after a malfunction of the substrate processing apparatus is detected, a substrate is transferred by a substrate transferring schedule generated by the transferring simulation process, and when the substrate processing apparatus recovers a normal state from the malfunction, a substrate is transferred again by a substrate transferring schedule generated by the linear programming process.