Laser-induced backside annealing using fluid absorber

• US 8,658,260 B2
• Filed: 04/23/2012
• Issued: 02/25/2014
• Est. Priority Date: 04/23/2012
• Status: Expired due to Fees

• Current Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Original Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Inventors: Zhang, Jie
• Primary Examiner(s): Meeks, Timothy
• Assistant Examiner(s): Agaj, Ina
• Application Number:
  US13/453,518
• Publication Number:
  US 20130280440A1
• Time in Patent Office: 673 Days
• Field of Search: None
• US Class Current: 427/554
• CPC Class Codes: H01L 31/022466 made of transparent conductive layers, e.g. TCO, ITO layers
• CPC Class Codes: H01L 31/1884 Manufacture of transparent electrodes, e.g. TCO, ITO
• CPC Class Codes: H05K 2201/0108 Transparent
• CPC Class Codes: H05K 2201/0326 Inorganic, non-metallic conductor, e.g. indium-tin oxide [ITO]
• CPC Class Codes: H05K 2203/0776 Uses of liquids not otherwise provided for in H05K2203/0759 - H05K2203/0773
• CPC Class Codes: H05K 2203/107 Using laser light shaping a substrate by laser ablation H05K3/0026
• CPC Class Codes: H05K 2203/1581 Treating the backside of the PCB, e.g. for heating during soldering or providing a liquid coating on the backside
• CPC Class Codes: H05K 3/02 in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
• CPC Class Codes: H05K 3/1283 After-treatment of the printed patterns, e.g. sintering or curing methods
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy

Abstract

A coating material containing metal oxide is applied to one side of a substrate, both coating and substrate being transparent to visible light. An absorber material is placed in heat transfer proximity to the coating and a laser beam is transmitted through the substrate and through the coating to strike the absorber material at the interface between coating and absorber. The absorber material absorbs optical energy from the laser beam causing the material to heat. Heat from the absorber propagates to the coating to heat a localized region, causing the coating material to anneal. If desired, the coating material can include a doping material that fuses into the coating during annealing.

Claims

1. A method of applying a film to a substrate, comprising:

applying a coating material to a backside of a substrate;

placing a liquid absorber material in heat transfer proximity to a backside of the substrate;

using a laser to heat the liquid absorber material by transmitting the laser beam first through the substrate and then through the coating material to supply optical energy to the liquid absorber material; and

using the heat from the liquid absorber material to alter the physical properties of the coating material such that the coating material forms a film adhered to the substrate.

2. The method of claim 1 wherein said laser produces a laser beam at a wavelength that is substantially transmissive through the substrate and through the coating material.

3. The method of claim 1 wherein the laser produces a laser beam at a predetermined wavelength and wherein the liquid absorber material comprises a material that is substantially absorptive at said predetermined wavelength.

4. The method of claim 1 wherein said liquid absorber material contains carbon particles in a fluid suspension.

5. The method of claim 1 wherein said liquid absorber material contains a dye of a color that substantially absorbs the laser light.

6. The method of claim 1 wherein said liquid absorber comprises nanoparticles that substantially absorb the laser light.

7. The method of claim 1 wherein said coating material comprises a metal oxide material.

8. The method of claim 1 wherein said coating material comprises a metal oxide material mixed with an organic binder to adhere the metal coating to the substrate.

9. The method of claim 1 wherein said coating material comprises a mixture of nanoparticles and an organic ligand.

10. The method of claim 1 wherein said coating material comprises a metal oxide material colloidally dispersed in a bonding material.

11. The method of claim 1 wherein said coating material comprises a combination of a metal oxide material and a sol-gel material.

12. The method of claim 1 further comprising introducing a doping material in said liquid absorber material.

13. The method of claim 1 further comprising adding a dopant material to the absorber prior to the step of using a laser to heat the liquid absorber material.

14. The method of claim 1 further comprising defining a containment chamber that includes at least a portion of the applied coating material and wherein the liquid absorber material is a fluid introduced into said containment chamber.

15. The method of claim 1 wherein the laser produces a laser beam at a wavelength of 405 nm.

16. The method of claim 1 wherein the laser produces a laser beam at a wavelength of 1064 nm.

17. The method of claim 1 wherein the laser produces a laser beam at a wavelength from 400 nm to 1550 nm.

18. The method of claim 1 further comprising adjusting the laser beam to have a predefined beam profile.

19. The method of claim 18 wherein the predefined beam profile is selected from the group consisting of Gaussian, top-hat and bowl-top.

20. The method of claim 1 further comprising using the heat from the liquid absorber material to anneal the coating material in a localized region of the coating material adjacent an interface between the applied coating material and the absorber.

21. The method of claim 1 further comprising focusing the laser beam at an interface between the applied coating material and the absorber.

22. The method of claim 1 further comprising controlling the duration of the transmission of the laser beam to supply optical energy to the liquid absorber material.

23. The method of claim 22 wherein duration is controlled by moving the laser beam relative to the substrate at a controlled rate or by moving the substrate relative to the laser beam at a controlled rate.

24. The method of claim 1 wherein the liquid absorber material has about the heat capacity of the coating material.

25. A method of applying a thin film to a substrate, comprising:

employing a laser that provides a laser beam at a predetermined wavelength that is substantially transmissive through said substrate;

selecting a coating material that is substantially transmissive at said predetermined wavelength and applying said coating material to said substrate to define a coated surface;

associating a containment vessel with the coated surface to define a fluid containment chamber that includes within its interior at least a portion of the coated surface;

selecting a fluid absorber material that is substantially absorptive at said predetermined wavelength and introducing said fluid absorber material into said containment chamber so that the fluid absorber material contacts said portion of the coated surface;

transmitting said laser beam through the substrate and also through the coating material to strike the fluid absorber material in a region substantially adjacent an interface between the fluid absorber material and coating material and thereby supply optical energy to the fluid absorber material causing the fluid absorber material to gain heat in the region where struck by the beam; and

allowing heat from said fluid absorber material to propagate to a localized region of coating material adjacent said interface in a quantity sufficient to anneal the coating material in the localized region.