Laser based cavity enhanced optical absorption gas analyzer

• US 8,659,759 B2
• Filed: 08/25/2011
• Issued: 02/25/2014
• Est. Priority Date: 08/25/2011
• Status: Active Grant

• Current Assignee: Li & S Company Limited (Yesco Holdings Co., Ltd.)
• Original Assignee: Li & S Company Limited (Yesco Holdings Co., Ltd.)
• Inventors: Koulikov, Serguei, Kachanov, Alexander
• Primary Examiner(s): Chowdhury, Tarifur
• Assistant Examiner(s): AKANBI, ISIAKA O
• Application Number:
  US13/218,359
• Publication Number:
  US 20130050706A1
• Time in Patent Office: 915 Days
• Field of Search: 356/469, 356/437, 356/72, 73/240.2
• US Class Current: 356/437
• CPC Class Codes: G01J 3/021 using plane or convex mirrors, parallel phase plates, or particular reflectors
• CPC Class Codes: G01J 3/42 Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry beam switching arrangements G01J3/08
• CPC Class Codes: G01N 21/031 Multipass arrangements
• CPC Class Codes: G01N 21/39 using tunable lasers

Abstract

Cavity enhanced absorption spectroscopy systems and methods for detecting trace gases. When the frequency of laser light approaches the frequency of a resonance cavity mode, the laser begins to fill the cavity to that mode. Optical intensity inside the cavity reflects total cavity loss when the laser light frequency coincides with the cavity mode transmission peak. The intra-cavity optical power also depends on the coupling efficiency of the laser beam to the particular cavity mode. Measurement of intensities of three optical signals, namely, intensity of the light incident on to the cavity, intensity of the light reflected from the cavity, and intensity of the intra-cavity optical power, with their appropriate normalization advantageously significantly reduce effects of baseline calibration and drift as the normalized signal only depends on total cavity loss, and not the coupling efficiency, as in traditional approaches.

Claims

1. A system for detecting one or more analyte species present in a gaseous or liquid medium, the system comprising:

a laser that emits continuous wave laser light;

a resonant optical cavity containing said medium and having at least two cavity mirrors, one of which is a cavity coupling mirror;

mode matching optics configured to couple the laser light to the cavity via the cavity coupling mirror;

a first detector configured to measure an intensity of the laser light incident on the cavity coupling mirror and to generate a first signal representing the intensity of the laser light incident on the cavity coupling mirror;

a second detector configured to measure an intensity of the laser light reflected by the cavity coupling mirror and to generate a second signal representing the intensity of the laser light reflected by the cavity coupling mirror;

a third detector configured to measure an intensity of the intracavity optical power of light circulating in the cavity and to generate a third signal representing the intracavity optical power of light circulating in the cavity; and

an intelligence module that processes the first, second and third signals and produces a normalized output signal that is a linear function of total cavity loss and that is not sensitive to laser-cavity coupling.

2. The system of claim 1, wherein the third detector includes a photodetector located external to the cavity and configured to produce a signal proportional to the intracavity optical power by detecting the intensity of light emerging from a cavity mirror.

3. The system of claim 1, wherein the third detector includes a photodetector located internal to the cavity and configured to obtain a signal proportional to the intracavity optical power by detecting the intensity of light scattered by one of the cavity mirrors.

4. The system of claim 1, wherein the third detector includes a photodetector located internal to the cavity and configured to obtain a signal proportional to the intracavity optical power by detecting the intensity of light scattered by said medium within the cavity.

5. The system of claim 1, wherein each of the first, second and third detectors includes a photodetector that outputs a signal proportional to the intensity of light detected.

6. The system of claim 1, wherein the cavity is a ring cavity having three or more cavity mirrors.

7. The system of claim 1, wherein the cavity is a linear cavity having two cavity mirrors.

8. The system of claim 1, wherein the cavity is a V-shaped cavity having three cavity mirrors.

9. The system of claim 1, wherein the cavity is capable of being scanned whereby an optical frequency of a cavity resonance peak is adjustable over a range of frequencies.

10. The system of claim 9, further including a means for controlling a position of one of the cavity mirrors so as to scan the optical frequency of the cavity resonance peak.

11. The system of claim 1, wherein the laser includes a semiconductor laser that is sensitive to optical feedback from light impinging on the laser from the cavity coupling mirror, the system further including a means for adjusting a phase of the light impinging on the laser from the cavity coupling mirror.

12. The system of claim 1,wherein the laser is capable of being scanned whereby a mean optical frequency of the laser is adjustable over a range of frequencies.

13. The system of claim 12 , further including means for adjusting the mean optical frequency of the laser so as to scan the mean optical frequency of the laser over a cavity resonance peak.

14. The system of claim 1, wherein the intelligence module produces the normalized signal by calculating a ratio of the difference between the intensity of the laser light incident on the cavity coupling mirror and the intensity of the laser light reflected by the cavity coupling mirror to the intensity of the intracavity optical power of light circulating in the cavity.

15. A method of detecting one or more analyte species present in a gaseous or liquid medium using a laser that that emits continuous wave laser light and a resonant optical cavity containing said medium and having at least two cavity mirrors, one of which is a cavity coupling mirror, the method comprising:

coupling the laser light to the cavity via the cavity coupling mirror using mode matching optics;

measuring an intensity of the laser light incident on the cavity coupling mirror generating a first signal representing the intensity of the laser light incident on the cavity coupling mirror;

measuring an intensity of the laser light reflected by the cavity coupling mirror and generating a second signal representing the intensity of the laser light reflected by the cavity coupling mirror;

measuring an intensity of the intracavity optical power of light circulating in the cavity and generating a third signal representing the intensity of the intracavity optical power of light circulating in the cavity; and

processing the first, second and third signals to produce a normalized signal that is a linear function of total cavity loss and that is not sensitive to laser-cavity coupling.

16. The method of claim 15, wherein the normalized signal is produced by calculating a ratio of the difference between the intensity of the laser light incident on the cavity coupling mirror and the intensity of the laser light reflected by the cavity coupling mirror to the intensity of the intracavity optical power of light circulating in the cavity.

17. The method of claim 15, wherein measuring an intensity of the intracavity optical power of light circulating in the cavity is performed using a photodetector located external to the cavity, and wherein the photodetector measures the intensity of light emerging from a cavity mirror.

18. The method of claim 15, wherein measuring an intensity of the intracavity optical power of light circulating in the cavity is performed using a photodetector located internal to the cavity, and wherein the photodetector measures the intensity of light scattered by one of the cavity mirrors.

19. The method of claim 15, wherein measuring an intensity of the intracavity optical power of light circulating in the cavity is performed using a photodetector located internal to the cavity, and wherein the photodetector measures the intensity of light scattered by said medium within the cavity.

20. The method of claim 15, wherein the cavity is a ring cavity having three or more cavity mirrors.

21. The method of claim 15, wherein the cavity is a V-shaped cavity having three cavity mirrors.

22. The method of claim 15, wherein the cavity is a linear cavity having two cavity mirrors.

23. The method of claim 15, further including scanning an optical frequency of a cavity resonance peak over a range of frequencies.

24. The method of claim 23, wherein scanning includes controlling a position of one of the cavity mirrors so as to scan the optical frequency of the cavity resonance peak.

25. The method of claim 15, further including scanning a mean optical frequency of the laser over a range of frequencies.

26. The method of claim 25, wherein scanning includes adjusting the mean optical frequency of the laser so as to scan the mean optical frequency of the laser over a cavity resonance peak.

27. A system for detecting one or more analyte species present in a gaseous or liquid medium, the system comprising:

a laser that emits continuous wave laser light;

a resonant optical cavity defined by at least two cavity mirrors, one of which is a cavity coupling mirror, wherein said medium is located within the cavity;

mode matching optics configured to couple the laser light to the cavity via the cavity coupling mirror;

a first means for measuring an intensity of the laser light incident on the cavity coupling mirror and for generating a first signal representing the intensity of the laser light incident on the cavity coupling mirror;

a second means for measuring an intensity of the laser light reflected by the cavity coupling mirror and for generating a second signal representing the intensity of the laser light reflected by the cavity coupling mirror;

a third means for measuring an intensity of the intracavity optical power of light circulating in the cavity and for generating a third signal representing the intracavity optical power of light circulating in the cavity; and

a means for processing signals received from the first, second and third means for measuring to produce a normalized signal that is a linear function of total cavity loss and that is not sensitive to laser-cavity coupling.

28. The system of claim 27, wherein the means for processing produces the normalized signal by calculating a ratio of the difference between the intensity of the laser light incident on the cavity coupling mirror and the intensity of the laser light reflected by the cavity coupling mirror to the intensity of the intracavity optical power of light circulating in the cavity.