Microelectromechanical gyroscopes and related apparatus and methods
First Claim
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1. An apparatus, comprising:
- a substrate having a first plate and a second plate, the first plate and the second plate collectively having a first mode when excited by a drive signal and having a second mode when excited by a gyroscopic effect, wherein the first and second plates each include a temperature-compensated stack having first and third layers that have a stiffness that increases with increasing temperature over a temperature range with a second layer between the first and third layers, wherein the second layer is formed from a different material than the first and third layers.
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Abstract
An apparatus is described that includes a substrate having a first plate and a second plate. The first plate and the second plate collectively have a first mode when excited by a drive signal and have a second mode when excited by a gyroscopic effect. The first and second plates each include a temperature-compensated stack having first and third layers that have a stiffness that increases with increasing temperature over a temperature range with a second layer between the first and third layers, where the second layer is formed from a different material than the first and third layers.
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Citations
42 Claims
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1. An apparatus, comprising:
a substrate having a first plate and a second plate, the first plate and the second plate collectively having a first mode when excited by a drive signal and having a second mode when excited by a gyroscopic effect, wherein the first and second plates each include a temperature-compensated stack having first and third layers that have a stiffness that increases with increasing temperature over a temperature range with a second layer between the first and third layers, wherein the second layer is formed from a different material than the first and third layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. An apparatus, comprising:
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a substrate; a member moveably coupled to the substrate at a first anchor and a second anchor, the member being in a first mode when excited by a drive signal and being in a second mode when excited by a gyroscopic effect, wherein the member includes a temperature-compensated stack having first and third layers that have a stiffness that increases with increasing temperature over a temperature range with a second layer between the first and third layers, wherein the second layer is formed from a different material than the first and third layers; and a circuit coupled to the member and configured to detect the gyroscopic effect. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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40. An apparatus, comprising:
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a micromechanical gyroscope configured to be excited in a first mode by a drive signal, the micromechanical gyroscope configured to be excited in a second mode by a gyroscopic effect, wherein the micromechanical gyroscope includes a temperature-compensated stack having a first layer of first material that has a stiffness that increases with increasing temperature over a temperature range and a second layer of second material that is different from the first material; and a circuit coupled to the micromechanical gyroscope and configured to detect the gyroscopic effect when the micromechanical gyroscope is in the second mode. - View Dependent Claims (41, 42)
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Specification