Z-axis microelectromechanical device with improved stopper structure
First Claim
1. A microelectromechanical device, comprising:
- a substrate;
elastic suspension elements;
a mobile mass, suspended above the substrate via the elastic suspension elements and configured to be rotated about said elastic suspension elements;
a cover structure arranged above said mobile mass and having an internal surface facing said mobile mass; and
a stopper structure arranged at said internal surface of said cover structure and extending from the internal surface towards said mobile mass, the stopper structure being configured to stop a movement of said mobile mass away from said substrate along an axis (z) transverse to said substrate, said stopper structure having tapered sides that extend from the internal surface towards a lower surface of the stopper structure, the tapered sides being configured to partially overlap edges of said mobile mass and configured to reduce an effect of a reciprocal electrostatic interaction, the lower surface of the stopper structure does not overlap the edges of the mobile mass.
1 Assignment
0 Petitions
Accused Products
Abstract
In a microelectromechanical device, a mobile mass is suspended above a substrate via elastic suspension elements and is rotatable about said elastic suspension elements, a cover structure is set above the mobile mass and has an internal surface facing the mobile mass, and a stopper structure is arranged at the internal surface of the cover structure and extends towards the mobile mass in order to stop a movement of the mobile mass away from the substrate along an axis (z) transverse to the substrate. The stopper structure is arranged with respect to the mobile mass so as to reduce an effect of reciprocal electrostatic interaction, in particular so as to minimize a resultant twisting moment of the mobile mass about the elastic suspension elements.
-
Citations
26 Claims
-
1. A microelectromechanical device, comprising:
-
a substrate; elastic suspension elements; a mobile mass, suspended above the substrate via the elastic suspension elements and configured to be rotated about said elastic suspension elements; a cover structure arranged above said mobile mass and having an internal surface facing said mobile mass; and a stopper structure arranged at said internal surface of said cover structure and extending from the internal surface towards said mobile mass, the stopper structure being configured to stop a movement of said mobile mass away from said substrate along an axis (z) transverse to said substrate, said stopper structure having tapered sides that extend from the internal surface towards a lower surface of the stopper structure, the tapered sides being configured to partially overlap edges of said mobile mass and configured to reduce an effect of a reciprocal electrostatic interaction, the lower surface of the stopper structure does not overlap the edges of the mobile mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
-
16. An electronic apparatus, comprising:
-
a substrate; first elastic suspension elements; a microelectromechanical device suspended above the substrate by the first elastic suspension elements, the microelectromechanical device including; second elastic suspension elements; a mobile mass, suspended above the substrate by the second elastic suspension elements and configured to rotate about said second elastic suspension elements; a cover structure arranged above said mobile mass and having an internal surface facing said mobile mass; and a stopper structure extending from said internal surface of said cover structure towards said mobile mass and configured to stop a movement of said mobile mass away from said substrate along an axis transverse to said substrate, said stopper structure having tapered sides that meet at a lower surface that is spaced from the mobile mass, the lower surface being parallel to the internal surface of the cover structure. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
-
Specification