Pellicle kit for manufacturing a pellicle

• US 8,663,756 B2
• Filed: 02/07/2012
• Issued: 03/04/2014
• Est. Priority Date: 02/08/2011
• Status: Active Grant

• Current Assignee: Shin-Etsu Chemical Company Limited
• Original Assignee: Shin-Etsu Chemical Company Limited
• Inventors: Hamada, Yuichi, Sema, Tatsuya
• Primary Examiner(s): FRASER, STEWART A
• Application Number:
  US13/367,719
• Publication Number:
  US 20120202001A1
• Time in Patent Office: 756 Days
• Field of Search: 430/5, 428/14, 428/99
• US Class Current: 428/14
• CPC Class Codes: G03F 1/64 characterised by the frames, e.g. structure or material, including bonding means therefor
• CPC Class Codes: Y10T 428/24008 including fastener for attaching to external surface

Abstract

There is provided a pellicle kit for manufacturing a pellicle which comprises a pellicle frame having a jig hole in the outer wall of its frame bar and a jig having a jig pin which is adjusted to enter the respective jig hole until the front end of the jig pin is abutted against the tapered bottom face of the jig hole to thereby fix said pellicle frame.

Claims

1. A pellicle kit for manufacturing a pellicle comprising:

a rectangular pellicle frame having one pair of opposite frame bars and jig holes, each having a tapered bottom face, in the pair of opposite frame bars; and

a jig having a pair of opposite and parallel side bars and at least one jig pin on each of the pair of opposite and parallel side bars, the at least one jig pin being capable of entering one of said jig holes until a front end of the jig pin abuts against the tapered bottom face of one of said jig holes to thereby fix said pellicle frame.

2. A pellicle kit for manufacturing a pellicle according to claim 1, wherein the front end of the at lease one jig pin is rounded.

3. A pellicle kit for manufacturing a pellicle according to claim 1, wherein the front end of the at lease one jig pin is semispherical.

4. A pellicle kit for manufacturing a pellicle according to claim 1, wherein said at lease one jig pin includes a cylindrical main body portion.

5. A pellicle kit for manufacturing a pellicle according to claim 1, wherein the jig pin includes a main body portion;

and

a diameter of the main body of the at lease one jig pin, is smaller than a diameter of one of the jig holes of the pellicle frame by 0.5 mm or more, and when the pellicle frame is fixed by at least one jig pin, a clearance between an inner wall of one of the jig holes and the main body portion of the at least one jig pin is 0.2 mm or greater.

6. A pellicle kit for manufacturing a pellicle according to claim 5, wherein said jig has at least two jig pins on one of said pair of opposite and parallel side bars, and at least two of said jig pins are compressible pins, each having a spring capable of freely contracting in a lengthwise direction and regaining an original length of the jig pins.

7. A pellicle kit for manufacturing a pellicle according to claim 6, wherein a spring load by which said jig pin urged against the tapered bottom face of a jig hole is 1.0 gram or smaller.

8. A pellicle kit for manufacturing a pellicle according to claim 2, wherein the at least one jig pin includes a cylindrical main body having a diameter smaller than that of the jig holes so that the cylindrical main body enters one of the jig holes and the front end of the at least one jig pin directly abuts against the tapered bottom face.

9. A pellicle kit for manufacturing a pellicle according to claim 8, wherein the front end of the at least one jig pin is rounded;

and

two jig pins are arranged on each of the pair of side bars, and the jig pins have a spring to contract and expand in a lengthwise direction of the jig pins.

10. A pellicle kit for manufacturing a pellicle according to claim 9, wherein a predetermined length of the main body portion is entered in one of the jig holes when the at least one jig fixes the pellicle frame.