Strengthened micro-electromechanical system devices and methods of making thereof
First Claim
1. A micro-electromechanical device comprising:
- a substrate;
a beam suspended relative to a surface of the substrate, the beam comprising a first beam portion and a second beam portion; and
an isolation joint between the first beam portion and the second beam portion, the isolation joint having a first isolation joint portion, a second isolation joint portion, and a first solid bridge portion, the bridge portion is between the first isolation joint portion and the second isolation joint portion, the first isolation joint portion and the second isolation joint portion each have a seam.
2 Assignments
0 Petitions
Accused Products
Abstract
In an embodiment, a micro-electromechanical device can include a substrate, a beam, and an isolation joint. The beam can be suspended relative to a surface of the substrate. The isolation joint can be between a first portion and a second portion of the beam, and can have a non-linear shape. In another embodiment, a micro-electromechanical device can include a substrate, a beam, and an isolation joint. The beam can be suspended relative to a surface of the substrate. The isolation joint can be between a first portion and a second portion of the beam. The isolation joint can have a first portion, a second portion, and a bridge portion between the first portion and the second portion. The first and second portions of the isolation joint can each have a seam and a void, while the bridge portion can be solid.
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Citations
14 Claims
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1. A micro-electromechanical device comprising:
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a substrate; a beam suspended relative to a surface of the substrate, the beam comprising a first beam portion and a second beam portion; and an isolation joint between the first beam portion and the second beam portion, the isolation joint having a first isolation joint portion, a second isolation joint portion, and a first solid bridge portion, the bridge portion is between the first isolation joint portion and the second isolation joint portion, the first isolation joint portion and the second isolation joint portion each have a seam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A computer-program product comprising a non-transitory computer-readable storage medium containing instructions that, if executed on a computing device, define a micro-electromechanical device comprising:
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a substrate; a beam suspended relative to a surface of the substrate, the beam comprising a first beam portion and a second beam portion; and an isolation joint between the first beam portion and the, second beam portion, the isolation joint comprising a first isolation joint portion, a second isolation joint portion, and a solid bridge portion, the bridge portion is between the first isolation joint portion and the second isolation joint portion, the first isolation joint portion and the second isolation joint portion each having a seam.
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Specification