Inspection method and inspection apparatus

• US 8,664,967 B2
• Filed: 03/02/2011
• Issued: 03/04/2014
• Est. Priority Date: 03/19/2001
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Hiroki, Masaaki
• Primary Examiner(s): Hollington, Jermele M
• Assistant Examiner(s): NGUYEN, TRUNG Q
• Application Number:
  US13/038,918
• Publication Number:
  US 20110148220A1
• Time in Patent Office: 1,098 Days
• Field of Search: None
• US Class Current: 324/750.15
• CPC Class Codes: G01R 31/3025 Wireless interface with the DUT
• CPC Class Codes: G01R 31/315 by inductive methods
• CPC Class Codes: G09G 3/006 Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays testing individual LED's G01R31/2635; testing lamps G01R31/44; testing of optical features of LCD displays G02F1/1309

Abstract

There is established an easier inspection method with which it is not required to set up probes on wires. Also, there is provided an inspection apparatus using this inspection method. With the inspection apparatus or inspection method, primary coils of an inspection substrate and secondary coils of a device substrate are superimposed on each other so that a certain space is maintained therebetween. An AC signal is inputted into the primary coils, thereby generating an electromotive force in each secondary coil by electromagnetic induction. Then, each circuit provided on the device substrate is driven using the electromotive force and information possessed by an electromagnetic wave or electric field generated in this circuit is monitored, thereby detecting each defective spot.

Claims

1. A semiconductor device comprising:

a power supply;

a first conductor electrically connected to the power supply; and

a unit,

wherein the first conductor is configured to wirelessly transmit electric power to a second conductor of a device,

wherein the unit is configured to monitor electromagnetic wave or electric field generated by the device;

wherein the device includes a plurality of pixels;

wherein each of the plurality of pixels comprises a thin film transistor and a pixel electrode connected to the thin film transistor, and

wherein the second conductor is electrically connected to the plurality of pixels.

2. The semiconductor device according to claim 1,

wherein the device comprises a rectifier circuit electrically connected to the second conductor.

3. The semiconductor device according to claim 1,

wherein the first conductor and the second conductor are coils.

4. The semiconductor device according to claim 1,

wherein the electromagnetic wave or the electrical field possesses an information such as a frequency, phase, strength, and time.

5. A semiconductor device comprising:

a power supply;

a first conductor electrically connected to the power supply; and

a unit,

wherein the first conductor is configured to wirelessly transmit electric power to a second conductor or a third conductor of a device,

wherein the unit is configured to monitor electromagnetic wave or electric field generated by the device;

wherein the device includes a plurality of pixels;

wherein each of the plurality of pixels comprises a thin film transistor and a pixel electrode connected to the thin film transistor, and

wherein the second conductor is electrically connected to the plurality of pixels.

6. The semiconductor device according to claim 5,

wherein the device comprises a rectifier circuit electrically connected to the second conductor.

7. The semiconductor device according to claim 5,

wherein the first conductor, the second conductor and the third conductor are coils.

8. The semiconductor device according to claim 5,

wherein the electromagnetic wave or the electrical field possesses an information such as a frequency, phase, strength, and time.

9. A semiconductor device comprising:

a power supply;

a first conductor electrically connected to the power supply;

a second conductor electrically connected to the power supply;

a unit,

wherein the first conductor or the second conductor is configured to wirelessly transmit electric power to a third conductor of a device, and

wherein the unit is configured to monitor electromagnetic wave or electric field generated by the device.

10. The semiconductor device according to claim 9,

wherein the device comprises a rectifier circuit electrically connected to the second conductor.

11. The semiconductor device according to claim 9,

wherein the first conductor, the second conductor and the third conductor are coils.

12. The semiconductor device according to claim 9,

wherein the electromagnetic wave or the electrical field possesses an information such as a frequency, phase, strength, and time.

13. The semiconductor device according to claim 9,

wherein the device is a display device.

14. A semiconductor device comprising:

a power supply;

a first conductor electrically connected to the power supply;

a second conductor electrically connected to the power supply;

a unit,

wherein the first conductor is configured to wirelessly transmit electric power to a third conductor of a device, and

wherein the second conductor is configured to wirelessly transmit electric power to a fourth conductor of the device, and

wherein the unit is configured to monitor electromagnetic wave or electric field generated by the device.

15. The semiconductor device according to claim 14,

wherein the device comprises a rectifier circuit electrically connected to the second conductor.

16. The semiconductor device according to claim 14,

wherein the first conductor, the second conductor, the third conductor and the fourth conductor are coils.

17. The semiconductor device according to claim 14,

wherein the electromagnetic wave or the electrical field possesses an information such as a frequency, phase, strength, and time.

18. The semiconductor device according to claim 14,

wherein the device is a display device.