Integrated microminiature relay
First Claim
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1. An apparatus comprising:
- a first substrate having a first surface and a second surface, the first substrate comprising a first coil for generating a magnetic field, wherein the first coil is substantially planar and lies in a first plane, and wherein the first coil and the first substrate are monolithically integrated; and
a second substrate comprising an electrical switch that comprises a first electrical contact and a second electrical contact, wherein the first electrical contact is moved by the magnetic field, and wherein the electrical switch and the second substrate are monolithically integrated, and further wherein the first electrical contact moves selectively in a second plane that is substantially parallel to the first plane;
wherein the first substrate further comprises a third electrical contact and a fourth electrical contact, and wherein the first coil is proximal to the first surface and distal to the second surface, and further wherein the third electrical contact and fourth electrical contact are proximal to the second surface and distal to the first surface; and
wherein the first coil generates the magnetic field based on a first current that flows between the third electrical contact and the fourth electrical contact.
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Abstract
A micro-relay that overcomes some of the limitations and drawbacks of the prior art is disclosed. The micro-relay comprising: (1) a first substrate comprising one or more monolithically integrated planar coils for generating a magnetic field; and (2) a second substrate comprising a magnetically actuated switch having a moving contact that selectively moves in a plane parallel to its substrate. The first and second substrate are aligned and bonded to collectively provide a closed magnetic circuit that efficiently channels the generated magnetic field through the switch.
49 Citations
16 Claims
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1. An apparatus comprising:
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a first substrate having a first surface and a second surface, the first substrate comprising a first coil for generating a magnetic field, wherein the first coil is substantially planar and lies in a first plane, and wherein the first coil and the first substrate are monolithically integrated; and a second substrate comprising an electrical switch that comprises a first electrical contact and a second electrical contact, wherein the first electrical contact is moved by the magnetic field, and wherein the electrical switch and the second substrate are monolithically integrated, and further wherein the first electrical contact moves selectively in a second plane that is substantially parallel to the first plane; wherein the first substrate further comprises a third electrical contact and a fourth electrical contact, and wherein the first coil is proximal to the first surface and distal to the second surface, and further wherein the third electrical contact and fourth electrical contact are proximal to the second surface and distal to the first surface; and wherein the first coil generates the magnetic field based on a first current that flows between the third electrical contact and the fourth electrical contact. - View Dependent Claims (2, 3, 4, 5)
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6. An apparatus comprising:
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a first coil for generating a magnetic field, wherein the first coil is substantially planar and lies in a first plane; a first magnetic core for channeling the magnetic field, wherein the first magnetic core comprises a first electrical terminal and a first electrical contact that is movable, and wherein the first coil surrounds the first magnetic core in the first plane; a second coil for augmenting the magnetic field, wherein the second coil is substantially planar and lies in a second plane; and a second magnetic core for channeling the magnetic field, wherein the second magnetic core comprises a second electrical terminal and a second electrical contact, and wherein the second coil surrounds the second magnetic core in the second plane; wherein the first electrical contact and the second electrical contact collectively define a magnetically actuated switch for controlling the flow of a first current between the first electrical terminal and the second electrical terminal. - View Dependent Claims (7, 8, 9, 10)
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11. An apparatus comprising:
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(1) a first substrate that defines a first plane, wherein the first substrate comprises a plurality of coils for collectively generating a magnetic field, and wherein each of the coils is substantially planar and parallel to the first plane, and further wherein the first substrate and the plurality of coils are monolithically integrated; (2) a second substrate comprising an electrical switch that comprises a first electrical contact and a second electrical contact, wherein the first electrical contact is dimensioned and arranged to move selectively in a second plane that is substantially parallel to the first plane, and further wherein the second substrate, the first electrical contact, and second electrical contact are monolithically integrated; and (3) a closed magnetic circuit for channeling the magnetic field through the electrical switch, wherein the closed magnetic circuit comprises; (i) a first magnetic core comprising; (a) a first via that is through the first substrate, wherein the first via and a first coil of the plurality of coils are concentric; (b) a second via that is through the second substrate; and (c) a first anchor comprising a first member that is movable in the second plane, wherein the first member comprises the first electrical contact, and wherein the second substrate, the first anchor, and the first member are monolithically integrated; wherein each of the first via, second via, and first anchor comprises ferromagnetic material; and (ii) a second magnetic core comprising; (a) a third via that is through the first substrate, wherein the third via and a second coil of the plurality of coils are concentric; (b) a fourth via that is through the second substrate; and (c) a second anchor comprising the second electrical contact, wherein the second substrate and the second anchor are monolithically integrated; wherein each of the third via, fourth via, and second anchor comprises ferromagnetic material; wherein the magnetic field moves the first electrical contact in the second plane to actuate the electrical switch. - View Dependent Claims (12)
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13. A method comprising:
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(1) providing a first substrate comprising a first coil for generating a magnetic field, wherein the first coil is substantially planar and lies in a first plane; (2) providing a second substrate comprising an electrical switch that is a magnetically actuated switch, wherein the electrical switch comprises a first electrical contact and a second electrical contact, and wherein the first electrical contact is movable selectively in a second plane; (3) arranging the first substrate and second substrate in a first arrangement wherein the second plane is substantially parallel to the first plane; and (4) enabling the coupling of the magnetic field and electrical switch by operations comprising; (i) providing a first magnetic core, wherein the first coil surrounds the first magnetic core in the first plane, and wherein the first magnetic core is provided by operations comprising; (a) forming a first via through the first substrate; (b) forming a second via through the second substrate; and (c) forming a first anchor on the second substrate, wherein the first anchor comprises a first member that is movable in the second plane, and wherein the first member comprises the first electrical contact; wherein each of the first via, second via, and first anchor comprises ferromagnetic material; and (ii) providing a second magnetic core, wherein the first magnetic core and second magnetic core collectively define a closed magnetic circuit, and wherein the second magnetic core is provided by operations comprising; (a) forming a third via that is through the first substrate; (b) forming a fourth via that is through the second substrate; and (c) forming a second anchor on the second substrate, wherein the second anchor comprises the second electrical contact; wherein each of the third via, fourth via, and second anchor comprises ferromagnetic material; wherein the first magnetic core and second magnetic core are dimensioned and arranged to collectively channel the magnetic field through the electrical switch, and wherein the first arrangement enables magnetic coupling between the first and second via and between the third and fourth via. - View Dependent Claims (14, 15, 16)
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Specification