Process for producing capacitive electromechanical conversion device, and capacitive electromechanical conversion device
First Claim
1. A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprising the steps of:
- providing a gas release path in at least one of the substrate and the membrane member, andforming the cavity by bonding the membrane member with the substrate after providing the gas release path;
wherein the gas release path protrudes along a bonded interface between the substrate and the membrane member, communicates with the outside, and does not communicate with the cavity.
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Accused Products
Abstract
A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprises the steps of: providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity.
52 Citations
10 Claims
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1. A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprising the steps of:
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providing a gas release path in at least one of the substrate and the membrane member, and forming the cavity by bonding the membrane member with the substrate after providing the gas release path; wherein the gas release path protrudes along a bonded interface between the substrate and the membrane member, communicates with the outside, and does not communicate with the cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A capacitive electromechanical conversion device obtained by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, comprising:
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a path which protrudes along a bonded interface between the substrate and the membrane member, communicates with the outside, and does not communicate with the cavity, provided in at least one of the substrate and the membrane member, wherein an end of the path opens to the outside at a portion between the substrate and the membrane member. - View Dependent Claims (10)
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Specification