Machine CVD shower head

• US 8,668,775 B2
• Filed: 03/28/2008
• Issued: 03/11/2014
• Est. Priority Date: 10/31/2007
• Status: Expired due to Fees

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Toshiba Techno Center Inc. (Toshiba Corporation)
• Inventors: Moshtagh, Vahid S., Ramer, Jeffrey C.
• Primary Examiner(s): Zervigon, Rudy
• Application Number:
  US12/058,380
• Publication Number:
  US 20090107403A1
• Time in Patent Office: 2,174 Days
• Field of Search: 118/715, 118/724, 15634533-34534, 156/345.37
• US Class Current: 118/715
• CPC Class Codes: C23C 16/45504 Laminar flow
• CPC Class Codes: C23C 16/45508 Radial flow
• CPC Class Codes: C23C 16/45572 Cooled nozzles
• CPC Class Codes: C23C 16/45574 Nozzles for more than one gas
• CPC Class Codes: C23C 16/45589 Movable means, e.g. fans
• CPC Class Codes: C23C 16/4584 the substrate being rotated
• CPC Class Codes: C30B 25/14 Feed and outlet means for the gases; Modifying the flow of the reactive gases
• CPC Class Codes: C30B 29/406 Gallium nitride
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

A shower head for a chemical vapor deposition chamber can have a housing, a plurality of bosses formed upon the housing, and an inside cover. The bosses can have bores formed therethrough. The inside cover can be attached to the bosses and can have apertures formed therein such that the apertures are generally contiguous with the bores. The housing, the bosses, and the inside cover cooperate to communicate water through the shower head. The water can cool the shower head to a temperature that is substantially lower than the temperature of other parts of the chemical vapor deposition chamber, e.g., the susceptor thereof.

Claims

1. A shower head for a chemical vapor deposition chamber, the shower head comprising:

a housing;

an outside cover attached to the housing;

a water inlet disposed on the outside cover;

a plurality of gas inlets disposed on the outside cover;

at least one partition formed integrally with the housing, a plurality of zones defined by the partition and the outside cover and disposed along the outside cover, the zones separating reactant gases prior to the reactant gases entering the chemical vapor deposition chamber;

a plurality of bosses machined into the housing to be integrated with the housing, the bosses having bores formed therethrough, the reactant gases flowing into the bores from the zones; and

an inside cover attached at a bottom of the housing, the plurality of bosses formed upon the inside cover, the inside cover having apertures formed therein such that the apertures are generally contiguous with the bores so that the reactant gases flow from the bores into the chemical vapor deposition chamber through the apertures,

wherein the housing, the bosses, and the inside cover form a channel where water flows and contacts the bosses for cooling of the shower head.

2. The shower head as recited in claim 1, wherein the housing is configured to facilitate the formation of a vacuum with the chamber.

3. The shower head as recited in claim 1, wherein the housing is formed of stainless steel.

4. The shower head as recited in claim 1, wherein the bosses are formed of stainless steel.

5. The shower head as recited in claim 1, wherein the inside cover is formed of stainless steel.

6. The shower head as recited in claim 1, wherein the inside cover is brazed to the housing.

7. The shower head as recited in claim 1, wherein the inside cover is brazed to the bosses and a periphery of the housing.

8. The shower head as recited in claim 1, wherein the bores of the bosses and the apertures of the inside cover cooperate to communicate reactant gases into the chemical vapor deposition chamber.

9. The shower head as recited in claim 1, wherein the partition comprises a plurality of concentric, generally circular, partitions.

10. The shower head as recited in claim 1, further comprising:

a water outlet disposed in a periphery of the shower head,

wherein the water inlet is disposed on a center of the outside cover, and

the water inlet, the channel and the water outlet are fluidly connected to flow water from the center of the outside cover to the periphery of the shower head removing heat from the plurality of bosses and the inside cover.

11. The shower head as recited in claim 1, wherein the reactant gasses are introduced into the shower head via the gas inlets, maintained separate from one another within the housing by the zones, and injected into the chemical vapor deposition chamber through the bores of the bosses and the apertures of the inside cover.

12. The shower head as recited in claim 1, further comprising a water outlet disclosed in a periphery of the shower head, wherein the water is introduced from the water inlet and flows between the bosses to the water outlet.