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Heat treatable four layer anti-reflection coating

  • US 8,668,990 B2
  • Filed: 01/27/2011
  • Issued: 03/11/2014
  • Est. Priority Date: 01/27/2011
  • Status: Expired due to Fees
First Claim
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1. A heat treated coated article comprising:

  • a substrate; and

    a first antireflection coating supported by a first major surface of the substrate, the substrate being heat treated together with the first antireflection coating disposed thereon,wherein the first antireflection coating comprises, in order moving away from the substrate;

    a stress-reducing layer comprising a material having a compressive residual stress after heat treatment,a medium index layer comprising silicon oxynitride,a high index layer comprising an oxide of niobium, anda low index layer comprising an oxide of silicon,wherein the first antireflection coating has a net compressive residual stress after heat treatment.

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