Stacked die package for MEMS resonator system
First Claim
1. A packaging structure for an electromechanical resonator system, the packaging structure comprising:
- a control chip for a microelectromechanical resonator;
an electromechanical resonator chip that (i) includes the microelectromechanical resonator and (ii) is mounted on the control chip in a stacked die configuration;
a first electrically conductive bump to electrically couple the control chip to the electromechanical resonator chip;
a lead frame including at least one electrical lead having a mounting surface and an electrical contact surface, wherein the stacked die configuration is mounted on and physically coupled to the mounting surface of the electrical lead; and
a mold compound, enclosing at least a portion of the lead frame and stacked die configuration of the control chip and the electromechanical resonator chip, wherein (i) the mounting surface of the electrical lead and the portion of the stacked die configuration which is mounted thereon are enclosed in the mold compound, and (ii) the electrical contact surface of the electrical lead is externally exposed; and
wherein the first electrically conductive bump is disposed (a) between the control chip and electromechanical resonator chip and (b) within the mold compound.
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Accused Products
Abstract
A stacked die package for an electromechanical resonator system includes an electromechanical resonator die bonded or fixed to a control IC die for the electromechanical resonator by, for example, a thermally and/or electrically conductive epoxy. In various embodiments, the electromechanical resonator can be a micro-electromechanical system (MEMS) resonator or a nano-electromechanical system (NEMS) resonator. Certain packaging configurations that may include the chip that contains the electromechanical resonator and the control chip include chip-on-lead (COL), chip-on-paddle (COP), and chip-on-tape (COT) packages. The stacked die package may provide small package footprint and/or low package thickness, and low thermal resistance and a robust conductive path between the dice.
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Citations
20 Claims
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1. A packaging structure for an electromechanical resonator system, the packaging structure comprising:
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a control chip for a microelectromechanical resonator; an electromechanical resonator chip that (i) includes the microelectromechanical resonator and (ii) is mounted on the control chip in a stacked die configuration; a first electrically conductive bump to electrically couple the control chip to the electromechanical resonator chip; a lead frame including at least one electrical lead having a mounting surface and an electrical contact surface, wherein the stacked die configuration is mounted on and physically coupled to the mounting surface of the electrical lead; and a mold compound, enclosing at least a portion of the lead frame and stacked die configuration of the control chip and the electromechanical resonator chip, wherein (i) the mounting surface of the electrical lead and the portion of the stacked die configuration which is mounted thereon are enclosed in the mold compound, and (ii) the electrical contact surface of the electrical lead is externally exposed; and wherein the first electrically conductive bump is disposed (a) between the control chip and electromechanical resonator chip and (b) within the mold compound. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification