High speed optical inspection system with camera array and compact, integrated illuminator
First Claim
1. An optical inspection system for inspecting a workpiece including a feature to be inspected, the system comprising:
- a workpiece transport configured to transport the workpiece in a nonstop manner; and
an illuminator configured to provide a first strobed illumination field type and a second strobed illumination field type, the illuminator including a light pipe configured to expand incident light rays in azimuth, but maintain incident light rays in elevation, the light pipe having a first end proximate the feature, and a second end opposite the first end and spaced from the first end, the light pipe also having at least one reflective sidewall, and wherein the first end has an exit aperture and the second end has at least one second end aperture to provide a view of the feature therethrough;
an array of cameras configured to digitally image the feature, wherein the array of cameras is configured to generate a first plurality of images of the feature with the first illumination field and a second plurality of images of the feature with the second illumination field; and
a processing device operably coupled to the illuminator and the array of cameras, the processing device being configured to store at least some of the first and second plurality of images and provide the first and second pluralities to an other device.
1 Assignment
0 Petitions
Accused Products
Abstract
An optical inspection system is provided for inspecting a workpiece including a feature to be inspected. The system includes a workpiece transport configured to transport the workpiece in a nonstop manner. An illuminator is configured to provide a first strobed illumination field type and a second strobed illumination field type. The illuminator includes a light pipe having a first end proximate the feature, and a second end opposite the first end and spaced from the first end. The light pipe also has at least one reflective sidewall. The first end has an exit aperture and the second end has at least one second end aperture to provide a view of the feature therethrough. An array of cameras is configured to digitally image the feature. The array of cameras is configured to generate a first plurality of images of the feature with the first illumination field and a second plurality of images of the feature with the second illumination field. A processing device is operably coupled to the illuminator and the array of cameras, the processing device is configured to store at least some of the first and second plurality of images and provide the first and second pluralities to an other device.
70 Citations
36 Claims
-
1. An optical inspection system for inspecting a workpiece including a feature to be inspected, the system comprising:
-
a workpiece transport configured to transport the workpiece in a nonstop manner; and an illuminator configured to provide a first strobed illumination field type and a second strobed illumination field type, the illuminator including a light pipe configured to expand incident light rays in azimuth, but maintain incident light rays in elevation, the light pipe having a first end proximate the feature, and a second end opposite the first end and spaced from the first end, the light pipe also having at least one reflective sidewall, and wherein the first end has an exit aperture and the second end has at least one second end aperture to provide a view of the feature therethrough; an array of cameras configured to digitally image the feature, wherein the array of cameras is configured to generate a first plurality of images of the feature with the first illumination field and a second plurality of images of the feature with the second illumination field; and a processing device operably coupled to the illuminator and the array of cameras, the processing device being configured to store at least some of the first and second plurality of images and provide the first and second pluralities to an other device. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
-
-
27. A method of inspecting an article of manufacture having at least one region of interest to provide an inspection result, the method comprising:
-
providing a light pipe that expands incident illumination in azimuth, but maintains incident illumination in elevation; generating relative motion between the article of manufacture and a camera array; simultaneously acquiring images from the camera array through the light pipe during the relative motion and while strobing a first illumination field type upon the article of manufacture; generating a stitched image with the acquired images; determining an inspection result relative to the at least one region of interest based, at least in part, upon the stitched image; and providing the inspection result. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35, 36)
-
Specification