Micromechanical component
First Claim
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1. A micromechanical component, comprising:
- a substrate;
a seismic mass which is deflectably situated on the substrate;
a stop structure to limit a deflection of the seismic mass in a direction away from the substrate, wherein the stop structure is situated on the substrate and has a limiting section in a plane with the seismic mass to limit the deflection of the seismic mass; and
a counter-structure situated on the seismic mass, and which comes into contact with the limiting section of the stop structure in an event of deflection of the seismic mass in a direction away from the substrate.
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Abstract
A micromechanical component which has a substrate, a seismic mass, which is deflectably situated on the substrate, and a stop structure for limiting a deflection of the seismic mass in a direction away from the substrate. The stop structure is situated on the substrate and has a limiting section for limiting the deflection of the seismic mass, which is in a plane with the seismic mass. Furthermore, a method for manufacturing a micromechanical component is described.
25 Citations
13 Claims
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1. A micromechanical component, comprising:
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a substrate; a seismic mass which is deflectably situated on the substrate; a stop structure to limit a deflection of the seismic mass in a direction away from the substrate, wherein the stop structure is situated on the substrate and has a limiting section in a plane with the seismic mass to limit the deflection of the seismic mass; and a counter-structure situated on the seismic mass, and which comes into contact with the limiting section of the stop structure in an event of deflection of the seismic mass in a direction away from the substrate. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A micromechanical component, comprising:
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a substrate; a seismic mass which is deflectably situated on the substrate; and a stop structure to limit a deflection of the seismic mass in a direction upward and away from the substrate, wherein the stop structure is situated on the substrate and has a limiting section in a plane with the seismic mass to limit the deflection of the seismic mass. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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Specification