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Three dimensional engineering of planar optical structures

  • US 8,673,407 B2
  • Filed: 07/28/2005
  • Issued: 03/18/2014
  • Est. Priority Date: 12/21/2001
  • Status: Expired due to Fees
First Claim
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1. A method for forming a patterned coating on a surface, the method being performed in a reaction chamber isolated from the ambient atmosphere and comprising:

  • a) reacting a first reactant flow with a radiation beam to form a first set of inorganic product particles in a first product particle stream, the product particles therein being less than about 500 nm in average diameter and having a temperature; and

    b) directing the first product particle stream through a first discrete mask at a surface to form the patterned coating on the surface in a deposition process, the first discrete mask adjacent the surface but not being bonded to the surface, wherein the first discrete mask and the surface move together relative to the first product particle stream to deposit the patterned coating, wherein the patterned coating comprises product particles that are fused to each other at the point of deposition during the deposition process due to the temperature of the product particles upon exit from the radiation beam allowing the particles to fuse upon contacting each other at the point of deposition during the deposition process.

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