Three dimensional engineering of planar optical structures
First Claim
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1. A method for forming a patterned coating on a surface, the method being performed in a reaction chamber isolated from the ambient atmosphere and comprising:
- a) reacting a first reactant flow with a radiation beam to form a first set of inorganic product particles in a first product particle stream, the product particles therein being less than about 500 nm in average diameter and having a temperature; and
b) directing the first product particle stream through a first discrete mask at a surface to form the patterned coating on the surface in a deposition process, the first discrete mask adjacent the surface but not being bonded to the surface, wherein the first discrete mask and the surface move together relative to the first product particle stream to deposit the patterned coating, wherein the patterned coating comprises product particles that are fused to each other at the point of deposition during the deposition process due to the temperature of the product particles upon exit from the radiation beam allowing the particles to fuse upon contacting each other at the point of deposition during the deposition process.
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Abstract
Three dimensional optical structures are described that can have various integrations between optical devices within and between layers of the optical structure. Optical turning elements can provide optical pathways between layers of optical devices. Methods are described that provide for great versatility on contouring optical materials throughout the optical structure. Various new optical devices are enabled by the improved optical processing approaches.
103 Citations
24 Claims
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1. A method for forming a patterned coating on a surface, the method being performed in a reaction chamber isolated from the ambient atmosphere and comprising:
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a) reacting a first reactant flow with a radiation beam to form a first set of inorganic product particles in a first product particle stream, the product particles therein being less than about 500 nm in average diameter and having a temperature; and b) directing the first product particle stream through a first discrete mask at a surface to form the patterned coating on the surface in a deposition process, the first discrete mask adjacent the surface but not being bonded to the surface, wherein the first discrete mask and the surface move together relative to the first product particle stream to deposit the patterned coating, wherein the patterned coating comprises product particles that are fused to each other at the point of deposition during the deposition process due to the temperature of the product particles upon exit from the radiation beam allowing the particles to fuse upon contacting each other at the point of deposition during the deposition process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method for forming a patterned coating on a surface with varying composition areas at different locations along the surface, the method being performed in a reaction chamber isolated from the ambient atmosphere and comprising:
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a) reacting a reactant stream with a radiation beam to form a product particle stream, the product articles being less about 500 nm in average diameter and having a temperature; and b) directing the product particle stream comprising inorganic product particles at the surface in a coating process wherein the patterned coating comprises product particles fused to each other at the point of deposition during the coating process due to the temperature of the product particles upon exit from the radiation beam allowing the particles to fuse upon contacting each other at the point of deposition during the desposition process, wherein the product particle stream sequentially coats portions of the surface wherein a discrete mask comprising an opening adjacent the surface but not being bonded to the surface is used to selectively direct the particle stream to the portions of the surface to produce discrete coated portions on the surface coinciding with the size and configuration of the opening and wherein the product particle stream is altered during the coating process to deposit different product particle compositions at the different locations along the surface so as to produce the patterned coating with the varying composition areas. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24)
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Specification