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Methods for forming materials using micro-heaters and electronic devices including such materials

  • US 8,673,693 B2
  • Filed: 04/20/2012
  • Issued: 03/18/2014
  • Est. Priority Date: 07/16/2007
  • Status: Expired due to Fees
First Claim
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1. A method for forming a material comprising:

  • applying energy to a micro-heater to heat the micro-heater;

    providing a precursor so as to be in thermal proximity to the micro-heater; and

    forming a material from the precursor with the heat from the micro-heater such that the material is formed directly on the micro-heater,wherein the micro-heater includes a substrate, at least one heating element unit on the substrate, a support structure between a portion of the substrate and a portion of the at least one heating element unit, the support structure tapering in width from the substrate to the at least one heating element unit,wherein the at least one heating element unit has a configuration that allows two or more heating element units to be repeatedly connected in series,wherein the at least one heating element unit has at least two first regions and a second region, the second region being located between the first regions, andwherein the support structure is located below a portion of the second region but not below the first regions.

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