Methods of forming semiconductor structures
First Claim
Patent Images
1. A method of forming a semiconductor structure, the method comprising:
- forming a through-silicon-via (TSV) opening in a substrate;
forming a dielectric layer continuously extending over the substrate and into the TSV opening;
forming at least one conductive material over the dielectric layer and in the TSV opening;
removing a portion of the at least one conductive material that is over the dielectric layer to form a TSV structure in the substrate;
forming a metallic line in the dielectric layer, wherein an upper surface of the metallic line is level with an upper surface of the TSV structure; and
removing a portion of the substrate, such that the TSV structure continuously extends through the substrate and the dielectric layer.
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Abstract
In a method of forming a semiconductor structure, a through-silicon-via (TSV) opening is formed in a substrate. A dielectric layer is formed to continuously extend over the substrate and into the TSV opening. At least one conductive material is formed over the dielectric layer and in the TSV opening. A portion of the at least one conductive material that is over the dielectric layer is removed to form a TSV structure in the substrate. A metallic line is formed in the dielectric layer. A portion of the substrate is removed, such that the TSV structure continuously extends through the substrate and the dielectric layer.
70 Citations
17 Claims
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1. A method of forming a semiconductor structure, the method comprising:
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forming a through-silicon-via (TSV) opening in a substrate; forming a dielectric layer continuously extending over the substrate and into the TSV opening; forming at least one conductive material over the dielectric layer and in the TSV opening; removing a portion of the at least one conductive material that is over the dielectric layer to form a TSV structure in the substrate; forming a metallic line in the dielectric layer, wherein an upper surface of the metallic line is level with an upper surface of the TSV structure; and removing a portion of the substrate, such that the TSV structure continuously extends through the substrate and the dielectric layer. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of forming a semiconductor structure, the method comprising:
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forming a through-silicon-via (TSV) opening in a substrate; forming a dielectric layer continuously extending over the substrate and into the TSV opening; forming at least one conductive material over the dielectric layer, the at least one conductive material formed both outside and in the TSV opening; removing a first portion of the at least one conductive material outside the TSV opening, while leaving a second portion of the at least one conductive material in the TSV opening to form a TSV structure in the substrate, wherein removing the first portion of the at least one conductive material comprises removing a partial thickness of a first portion of the dielectric layer underlying the first portion of the at least one conductive material; and forming a metallic line in the first portion of the dielectric layer after removing the partial thickness of the first portion of the dielectric layer, wherein an upper surface of the metallic line is level with an upper surface of the TSV structure and level with an upper surface of the dielectric layer. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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14. A method of forming a semiconductor structure, the method comprising:
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forming a semiconductor device over a substrate; forming a dielectric layer over the substrate, the semiconductor device embedded in the dielectric layer; forming a through-silicon-via (TSV) opening continuously extending through the dielectric layer and into the substrate; forming a liner layer continuously extending over the dielectric layer and into the TSV opening; forming at least one conductive material over the liner layer and in the TSV opening; removing a portion of the at least one conductive material outside the TSV opening, while leaving a further portion of the at least one conductive material in the TSV opening to form a TSV structure in the substrate; forming a metallic line in the liner layer outside the TSV opening; and removing a portion of the substrate, such that the TSV structure continuously extends through the substrate, the dielectric layer and the liner layer, wherein a first portion of the liner layer that is over the substrate has a first thickness measured in a thickness direction of the substrate, a second portion of the liner layer that is interposed between the TSV structure and the substrate has a second thickness measured in a direction perpendicular to the thickness direction of the substrate, the second thickness is greater than the first thickness, and forming the metallic line comprises forming the metallic line in the first portion of the liner layer such that the metallic line has an upper surface leveled with an upper surface of the TSV structure and leveled with an upper surface of the first portion of the liner layer. - View Dependent Claims (15, 16, 17)
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Specification