Detecting and preventing instabilities in plasma processes

• US 8,674,606 B2
• Filed: 04/25/2010
• Issued: 03/18/2014
• Est. Priority Date: 04/27/2009
• Status: Active Grant

• Current Assignee: AES Global Holdings Pte Ltd. (Advanced Energy Industries, Inc. (China))
• Original Assignee: Advanced Energy Industries Incorporated
• Inventors: Carter, Daniel, Brouk, Victor, Roberg, Jeff
• Primary Examiner(s): Owens, Douglas W
• Assistant Examiner(s): HAMMOND, DEDEI KHALIEAH
• Application Number:
  US12/766,913
• Publication Number:
  US 20100270141A1
• Time in Patent Office: 1,423 Days
• Field of Search: 315/111.21
• US Class Current: 315/111.21
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/3299 Feedback systems
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence

Abstract

Systems, methods and apparatus for reducing instabilities in a plasma-based processing system are disclosed. An exemplary method includes applying power to a plasma with a power amplifier; determining whether low frequency instability oscillations are present or high frequency instability oscillations are present in the plasma; and altering, based upon whether high or low frequency instability oscillations are present, an impedance of a load that is experienced by the power amplifier, the load experienced by the power amplifier including at least an impedance of the plasma.

Claims

1. A method for reducing instabilities in a plasma-based processing system, the method comprising:

applying power to a plasma with a power amplifier;

obtaining samples indicative of an impedance of the plasma;

determining a frequency of instability oscillations, resulting from plasma-power amplifier interaction, that are present in the plasma by analyzing the samples to identify oscillatory variations in the plasma impedance; and

altering, based upon the frequency of instability oscillations that are present, an impedance of a load that is experienced by the power amplifier to reduce any instability oscillations in the plasma, the load experienced by the power amplifier including at least an impedance of the plasma, and altering the impedance of the load includes altering a frequency of the power that is applied to the plasma by the power amplifier.

2. The method of claim 1, wherein determining the frequency of instability oscillations includes monitoring the power that is applied by the power amplifier at an output of the power amplifier.

3. The method of claim 1, including detecting an instability in advance of determining the frequency of instability oscillations in the plasma.

4. The method of claim 1, wherein altering the impedance of the load includes altering the impedance of the load so that a vector angle of the load is closer to being orthogonal to a gradient of constant power contours of the power amplifier.

5. The method of claim 1, wherein altering the impedance of the load includes altering the impedance of the load by altering a cable length of a cable that couples power from the power amplifier to the plasma.

6. The method of claim 1, wherein altering the impedance of the load includes altering an impedance of a match network that is disposed between the power amplifier and the plasma.

7. A system for reducing instabilities in a plasma-based processing system, the system comprising:

a power amplifier configured to apply power to a plasma processing chamber to ignite and sustain a plasma;

a sensor configured to sense at least one characteristic indicative of an impedance of the plasma;

a stability controller configured to obtain samples of the at least one sensed characteristic and determine a frequency of instability oscillations that are present in the plasma by analyzing the samples to identify oscillatory variations in the plasma impedance, and responsive to the frequency of instability oscillations that are present in the plasma, the stability controller controls an operating frequency of the power amplifier to control a load impedance that is experienced by the power amplifier to reduce any instability oscillations in the plasma.

8. The system of claim 7, wherein the stability controller controls an impedance of a match network, the match network affecting the load impedance.

9. The system of claim 7, wherein the stability controller provides a signal that enables a cable length to be altered based upon the control signal, the cable length affecting the load impedance.

10. The system of claim 7, wherein the sensor is a sensor selected from the group consisting of a directional coupler and a VI sensor.

11. An apparatus for reducing instabilities in a plasma-based processing system, the apparatus comprising:

a measurement component configured to provide measurements that are indicative of an impedance of the plasma;

an instability detection component configured to obtain samples of the measurements, determine a frequency of instability oscillations in the plasma impedance by analyzing the samples, and provide a signal indicative of the frequency of any instability oscillations that are present in the plasma; and

a frequency controller in communication with the instability detection component, the frequency controller configured to generate, based upon the frequency of any instability oscillations, a frequency control signal which controls an output frequency of an amplifier so that the frequency of power that is output by the amplifier alters an impedance of a load experienced by the amplifier so as to reduce any instabilities in the plasma-based processing system.

12. The apparatus of claim 11, including:

a complex-F component that performs a complex division of forward and reflected voltages that are obtained from the measurements of power from the measurement component to obtain real and imaginary components of Γ

;

wherein the instability detection component receives the real and imaginary components of Γ and

generates the signal indicative of the frequency of any instability oscillations and a signal indicative of a magnitude of the instability oscillations.