Vertical carbon nanotube device in nanoporous templates
First Claim
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1. A method comprising:
- providing a substrate;
placing a first layer including a first material on the substratestacking a layer of catalyst for synthesis of carbon nanostructures atop the first layer;
stacking a second layer including said first material atop the layer of catalyst; and
thencreating a plurality of nanopores in the first layer, catalyst, and second layer;
wherein each of the nanopores serially traverses the layer of catalyst and the second layer; and
thensynthesizing with the catalyst a carbon nanostructure in each of the nanopores.
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Abstract
A modified porous anodic alumina template (PAA) containing a thin CNT catalyst layer directly embedded into the pore walls. CNT synthesis using the template selectively catalyzes SWNTs and DWNTs from the embedded catalyst layer to the top PAA surface, creating a vertical CNT channel within the pores. Subsequent processing allows for easy contact metallization and adaptable functionalization of the CNTs and template for a myriad of applications.
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Citations
42 Claims
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1. A method comprising:
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providing a substrate; placing a first layer including a first material on the substrate stacking a layer of catalyst for synthesis of carbon nanostructures atop the first layer; stacking a second layer including said first material atop the layer of catalyst; and
thencreating a plurality of nanopores in the first layer, catalyst, and second layer; wherein each of the nanopores serially traverses the layer of catalyst and the second layer; and
thensynthesizing with the catalyst a carbon nanostructure in each of the nanopores. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method comprising:
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providing a substrate; placing a first layer including a first material on the substrate stacking a layer of catalyst for synthesis of carbon nanostructures atop the first layer; stacking a second layer including said first material atop the layer of catalyst; diffusing the layer of catalyst into at least one of the first layer or the second layer;
wherein each of a plurality of nanopores serially traverses the layer of catalyst and the second layer, andsynthesizing with the catalyst a carbon nanostructure after said diffusing. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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38. A method comprising:
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providing a substrate; placing a first layer including a first material on the substrate; stacking atop the first layer a catalyst for synthesis of carbon nanostructures; stacking a second layer of said first material atop the catalyst; creating a plurality of nanopores in the first layer, catalyst, and second layer; placing the nanoporous substrate with the first material and the catalyst in a chamber having a second organic material in the vapor phase and a plasma; electrically biasing the substrate relative to the walls of the chamber after said placing; and synthesizing with the catalyst a carbon nanostructure in each of the nanopores during said biasing. - View Dependent Claims (39, 40, 41, 42)
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Specification