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Semiconductor light emitting device and method for manufacturing same

  • US 8,680,561 B2
  • Filed: 03/01/2011
  • Issued: 03/25/2014
  • Est. Priority Date: 09/06/2010
  • Status: Expired due to Fees
First Claim
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1. A semiconductor light emitting device, comprising:

  • a first semiconductor layer of a first conductivity type;

    a second semiconductor layer of a second conductivity type;

    a light emitting layer provided between the first semiconductor layer and the second semiconductor layer;

    a first electrode layer provided on a side of the second semiconductor layer opposite to the first semiconductor layer, the first electrode layer including a metal portion and a plurality of opening portions piercing the metal portion along a direction from the first semiconductor layer toward the second semiconductor layer, the metal portion contacting the second semiconductor layer, an equivalent circular diameter of a configuration of each of the plurality of opening portions as viewed along the direction being not less than 10 nanometers and not more than 5 micrometers; and

    a second electrode layer electrically connected to the first semiconductor layer,the second semiconductor layer including a protruding portion contacting the metal portion and a recessed portion recessed from the protruding portion along the direction at a bottom portion of the opening portion, the recessed portions corresponding to the opening portions.

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