Photosensitive imaging devices and associated methods

• US 8,680,591 B2
• Filed: 09/17/2010
• Issued: 03/25/2014
• Est. Priority Date: 09/17/2009
• Status: Active Grant

• Current Assignee: SiOnyx, LLC (DC Capital Partners, LLC)
• Original Assignee: SiOnyx, LLC (DC Capital Partners, LLC)
• Inventors: Jiang, Jutao, Palsule, Chintamani, McKee, Jeffrey, Miller, Drake, Forbes, Leonard, Haddad, Homayoon
• Primary Examiner(s): Toledo, Fernando L
• Assistant Examiner(s): BACHNER, ROBERT G
• Application Number:
  US12/885,158
• Publication Number:
  US 20110227138A1
• Time in Patent Office: 1,285 Days
• Field of Search: 257/291, 257/432, 257/290, 257/E21.128, 257/E31.085, 257/414, 257/433, 257/436, 257/431, 438/71, 438/48
• US Class Current: 257/291
• CPC Class Codes: H01L 27/14609 Pixel-elements with integrated switching, control, storage or amplification elements scanning details of imagers (circuitry of solid-state image sensors H04N25/00); circuitry of imagers H04N25/70
• CPC Class Codes: H01L 27/14625 Optical elements or arrangements associated with the device
• CPC Class Codes: H01L 27/14627 Microlenses
• CPC Class Codes: H01L 27/14629 Reflectors
• CPC Class Codes: H01L 27/1464 Back illuminated imager structures

Abstract

Photosensitive devices and associated methods are provided. In one aspect, for example, a photosensitive imager device can include a semiconductor substrate having multiple doped regions forming at least one junction, a textured region coupled to the semiconductor substrate and positioned to interact with electromagnetic radiation, and an electrical transfer element coupled to the semiconductor substrate and operable to transfer an electrical signal from the at least one junction. In one aspect, the textured region is operable to facilitate generation of an electrical signal from the detection of infrared electromagnetic radiation. In another aspect, interacting with electromagnetic radiation further includes increasing the semiconductor substrate'"'"'s effective absorption wavelength as compared to a semiconductor substrate lacking a textured region.

Claims

1. A photosensitive imager device, comprising:

a semiconductor substrate having a substantially planar surface and multiple doped regions forming a least one junction;

a textured region coupled to the semiconductor substrate on a surface opposite the substantially planar surface and positioned to interact with electromagnetic radiation;

integrated circuitry formed at the substantially planar surface; and

an electrical transfer element coupled to the semiconductor substrate and operable to transfer an electrical signal from the at least one junction.

2. The device of claim 1, wherein the transfer element is selected from the group consisting of a transistor, a sensing node, a transfer gate, and combinations thereof.

3. The device of claim 1, further comprising a reflective layer coupled to the semiconductor substrate and positioned to maintain the electromagnetic radiation in the semiconductor substrate.

4. The device of claim 1, wherein the textured region has a surface morphology operable to direct electromagnetic radiation into or out of the semiconductor substrate.

5. The device of claim 4, wherein the surface morphology of the textured region relative to the semiconductor substrate is a member selected from the group consisting of sloping, pyramidal, inverted pyramidal, spherical, parabolic, asymmetric, symmetric, and combinations thereof.

6. The device of claim 1, further comprising an additional textured region positioned on a surface of the semiconductor substrate that is adjacent the multiple doped regions.

7. The device of claim 1, wherein the textured region includes surface features having a size selected from the group consisting of micron-sized, nano-sized, and combinations thereof.

8. The device of claim 7, wherein surface features include a member selected from the group consisting of cones, pillars, pyramids, micolenses, quantum dots, inverted features, and combinations thereof.

9. The device of claim 1, wherein the textured region has been formed by a process selected from the group consisting of lasing, chemical etching, and combinations thereof.

10. The device of claim 1, further comprising a lens optically coupled to the semiconductor substrate and positioned to focus incident electromagnetic radiation into the semiconductor substrate.

11. A photosensitive imager array, comprising at least two photosensitive imager devices of claim 1.

12. The array of claim 11, further comprising at least one trench isolation positioned between the at least two photosensitive imager device.

24. The device of claim 9, wherein the textured region has been formed by lasing.

25. The device of claim 24, wherein the textured region has been formed by lasing with short duration laser pulses.

26. The device of claim 1, wherein the semiconductor substrate includes monocrystal silicon.

13. A method of making a photosensitive imager device, comprising:

forming a textured region on a semiconductor substrate, wherein the semiconductor substrate has a substantially planar surface opposite the textured region and multiple doped regions forming a least one junction, and wherein the textured region is formed in a position to interact with electromagnetic radiation;

forming integrated circuitry on the substantially planar surface; and

coupling an electrical transfer element to the semiconductor substrate such that the electrical transfer element is operable to transfer an electrical signal from the at least one junction.

14. The method of claim 13, wherein forming the textured region is by a process selected from the group consisting of lasing, chemical etching, nanoimprinting, material deposition, and combinations thereof.

15. The method of claim 13, wherein forming the textured region includes irradiating a target region with laser radiation to form surface features having a size selected from the group consisting of micron-sized, nano-sized, and combinations thereof.

16. The method of claim 15, wherein irradiating the target region includes exposing the laser radiation to a dopant such that the irradiation incorporates the dopant into the textured region.

17. The method of claim 15, wherein the irradiation is performed using a pulsed laser including a member selected from the group consisting of a femtosecond laser, a picosecond laser, a nanosecond laser, and combinations thereof.

18. The method of claim 13, further comprising tuning an electrical response of the photosensitive imager device.

19. The method of claim 18, wherein tuning includes forming surface features to have dimensions that selectively diffuse or selectively absorb a desired wavelength of electromagnetic radiation.

20. The method of claim 18, wherein tuning is accomplished through a factor selected from the group consisting of placement of the textured region, material type of the textured region, thickness of the textured region, dopant type of the textured region, doping profile of the texture region, doping profile of the semiconductor substrate, thickness of the substrate, and combinations thereof.

21. The method of claim 13, wherein the transfer element is selected from the group consisting of a transistor, a sensing node, a transfer gate, and combinations thereof.

22. The method of claim 13, further comprising annealing the semiconductor substrate to a temperature of from about 300°

C. to about 1100°

C.

23. A photosensitive imager device, comprising:

a semiconductor substrate having a substantially planar surface and multiple doped regions forming a least one junction;

a textured region coupled to the semiconductor substrate on a surface opposite the substantially planar surface and positioned to interact with electromagnetic radiation; and

at least 4 transistors formed at the substantially planar surface with at least one of the transistors electrically coupled to the at least one junction.