Substrate processing apparatus with motors integral to chamber walls

• US 8,680,803 B2
• Filed: 08/06/2012
• Issued: 03/25/2014
• Est. Priority Date: 07/17/2007
• Status: Active Grant

• Current Assignee: Brooks Automation Ltd. (United Kingdom) (Azenta, Inc.)
• Original Assignee: Brooks Automation Incorporated (Azenta, Inc.)
• Inventors: Krupyshev, Alexander G., Hofmeister, Christopher
• Primary Examiner(s): Ip, Paul
• Application Number:
  US13/567,812
• Publication Number:
  US 20120301261A1
• Time in Patent Office: 596 Days
• Field of Search: 318/568.11, 318/568.12, 318/568.21, 318/560, 318/561, 738/659, 700/213, 744/900.3, 310/90.5
• US Class Current: 318/568.21
• CPC Class Codes: H01L 21/67742 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance
• CPC Class Codes: H02K 2201/18 Machines moving with multiple degrees of freedom
• CPC Class Codes: H02K 41/03 Synchronous motors; Motors moving step by step; Reluctance motors H02K41/035 takes precedence

Abstract

In accordance to an aspect of the disclosed embodiments, a substrate transport apparatus is provided. The substrate transport apparatus includes a frame defining a chamber, at least one stator module embedded at least partly into a peripheral wall of the chamber, the at least one stator module defining an axis of rotation. The substrate transport apparatus further includes at least one rotor substantially concentrically disposed relative to the at least one stator module about the axis of rotation, the at least one rotor being configured to interface with the at least one stator module and being suspended by a respective one of the at least one stator module substantially without contact within the chamber. The substrate transport apparatus further includes at least one substrate transport arm connected to the at least one rotor and having at least one end effector configured to hold at least one substrate.

Claims

1. A substrate processing apparatus comprising:

a frame having at least one sealable chamber capable of holding a predetermined atmosphere;

at least one stator embedded at least partly into a peripheral wall of the at least one chamber, the at least one stator defining an axis of rotation;

at least one rotor operative with the at least one stator and disposed substantially concentrically relative to the at least one stator about the axis or rotation, the at least one rotor being suspended in the at least one chamber by the at least one stator substantially without contact;

at least one transport arm connected to the at least one rotor and having at least one end effector for holding at least one substrate;

a closable opening disposed in a side of the at least one chamber, wherein the frame is arranged for removably connecting another chamber to the side of the at least one chamber and the closable opening is configured so that the at least one transport arm moves the at least one substrate between the at least one chamber and the other chamber through the closable opening.

2. The apparatus of claim 1, wherein the other chamber is a processing module.

3. The apparatus of claim 1, wherein the other chamber is a transport chamber.

4. The apparatus of claim 1, further comprising a vacuum/vent system coupled to the at least one chamber.

5. A substrate processing apparatus comprising:

a frame having a first sealable chamber capable of holding a predetermined atmosphere, the first sealable chamber including

at least one stator embedded at least partly into a peripheral wall of the first sealable chamber, the at least one stator defining an axis of rotation,

at least one rotor operative with the at least one stator and disposed substantially concentrically relative to the at least one stator about the axis of rotation, the at least one rotor being suspended in the first sealable chamber by the at least one stator substantially without contact,

at least one transport arm connected to the at least one rotor and having at least one end effector for holding at least one substrate; and

the frame further having a second chamber connected to the first sealable chamber, the second chamber including at least one transport arm.

6. The substrate processing apparatus of claim 5, wherein the second chamber is removably connected to the first sealable chamber.

7. The substrate processing apparatus of claim 5, wherein each of the first sealable chamber and the second chamber include a vacuum/vent system coupled to a respective one of the first sealable chamber and the second chamber.

8. The substrate processing apparatus of claim 5, wherein the at least one transport arm of the first sealable chamber includes a first transport arm and a second transport arm.

9. The substrate processing apparatus of claim 5, wherein the at least one transport arm of the first sealable chamber comprises a bi-symmetric arm arrangement.

10. The substrate processing apparatus of claim 5, wherein the at least one transport arm of the first sealable chamber comprises a symmetric arm arrangement.

11. The substrate processing apparatus of claim 5, wherein the at least one transport arm of the first sealable chamber comprises a SCARA arrangement.

12. A substrate processing apparatus comprising:

a frame having a first sealable chamber and a second sealable chamber connected to the first sealable chamber, the first sealable chamber including

at least one stator embedded at least partly into a peripheral wall of the first sealable chamber, the at least one stator defining an axis of rotation;

at least one rotor operative with the at least one stator and disposed substantially concentrically relative to the at least one stator about the axis of rotation, the at least one rotor being suspended in the first sealable chamber by the at least one stator substantially without contact; and

at least one transport arm connected to the at least one rotor and having at least one end effector for holding at least one substrate.

13. The substrate processing apparatus of claim 12, wherein the second sealable chamber is a transport chamber.

14. The substrate processing apparatus of claim 13, wherein the second sealable chamber includes

at least one stator embedded at least partly into a peripheral wall of the first sealable chamber, the at least one stator defining an axis of rotation;

at least one rotor operative with the at least one stator and disposed substantially concentrically relative to the at least one stator about the axis of rotation, the at least one rotor being suspended in the second sealable chamber by the at least one stator substantially without contact; and

at least one transport arm connected to the at least one rotor and having at least one end effector for holding at least one substrate.

15. The substrate processing apparatus of claim 12, wherein the second sealable chamber comprises a processing module.

16. The substrate processing apparatus of claim 12, wherein the second sealable chamber is removably connected to the first sealable chamber.

17. The substrate processing apparatus of claim 12, wherein each of the first sealable chamber and the second sealable chamber include a vacuum/vent system coupled to a respective one of the first sealable chamber and the second sealable chamber.

18. The substrate processing apparatus of claim 12, wherein the at least one transport arm of the first sealable chamber includes a first transport arm and a second transport arm.

19. The substrate processing apparatus of claim 12, wherein the at least one transport arm of the first sealable chamber comprises a bi-symmetric arm arrangement, a symmetric arm arrangement, or a SCARA arrangement.