System and methods for forming apertures in microfeature workpieces
First Claim
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1. A method for forming a plurality of apertures in a microfeature workpiece, the method comprising:
- impinging a laser beam upon the microfeature workpiece to form a first aperture;
sensing the laser beam pass through the microfeature workpiece with a sensor; and
forming a second aperture by controlling the laser beam based on a determined number of pulses of the laser beam to form the first aperture and/or a determined elapsed time to form the first aperture.
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Abstract
Systems and methods for forming apertures in microfeature workpieces are disclosed herein. In one embodiment, a method includes directing a laser beam toward a microfeature workpiece to form an aperture and sensing the laser beam pass through the microfeature workpiece in real time. The method can further include determining a number of pulses of the laser beam and/or an elapsed time to form the aperture and controlling the laser beam based on the determined number of pulses and/or the determined elapsed time to form a second aperture in the microfeature workpiece.
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6 Claims
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1. A method for forming a plurality of apertures in a microfeature workpiece, the method comprising:
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impinging a laser beam upon the microfeature workpiece to form a first aperture; sensing the laser beam pass through the microfeature workpiece with a sensor; and forming a second aperture by controlling the laser beam based on a determined number of pulses of the laser beam to form the first aperture and/or a determined elapsed time to form the first aperture. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification