Light-transmitting metal electrode and process for production thereof

• US 8,686,459 B2
• Filed: 09/23/2008
• Issued: 04/01/2014
• Est. Priority Date: 02/25/2008
• Status: Active Grant

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Tsutsumi, Eishi, Nakanishi, Tsutomu, Fujimoto, Akira, Asakawa, Koji
• Primary Examiner(s): Kraig, William F
• Assistant Examiner(s): Crawford, Latanya N
• Application Number:
  US12/236,132
• Publication Number:
  US 20090211783A1
• Time in Patent Office: 2,016 Days
• Field of Search: 257/99, 257/E33.067, 257/81, 257/94, 257/10, 257/98, 257/E33.062, 257/E33.065, 438/22, 313/505
• US Class Current: 257/99
• CPC Class Codes: H01B 13/0036 Details
• CPC Class Codes: H01J 1/02 Main electrodes
• CPC Class Codes: H01J 17/04 Electrodes; Screens
• CPC Class Codes: H01J 2217/49207 Electrodes
• CPC Class Codes: H01J 63/02 Details, e.g. electrode, gas filling, shape of vessel
• CPC Class Codes: H01J 9/02 Manufacture of electrodes or electrode systems

Abstract

The present invention provides a light-transmitting metal electrode including a substrate and a metal electrode layer having plural openings. The metal electrode layer also has such a continuous metal part that any pair of point-positions in the part is continuously connected without breaks. The openings in the metal electrode layer are periodically arranged to form plural microdomains. The plural microdomains are so placed that the in-plane arranging directions thereof are oriented independently of each other. The thickness of the metal electrode layer is in the range of 10 to 200 nm.

Claims

1. A light-transmitting metal electrode comprising:

a substrate; and

a metal electrode layer having a thickness of 10 to 200 nm and formed on the substrate, the metal electrode layer comprising;

a continuous metal part, any two points in the continuous metal part being continuously connected without breaks; and

a plurality of openings penetrating through the metal electrode layer and being arranged so that a distribution of the openings is represented by a radial distribution function curve having a half-width of 5 to 300 nm.

2. The metal electrode according to claim 1, wherein the metal electrode layer is made of a metal selected from a group consisting of aluminum, silver, platinum, nickel, and cobalt.

3. The metal electrode according to claim 1, wherein a light-transmittance of the metal electrode, at a wavelength of light incident to the metal electrode, is not smaller than a mean area ratio of the openings in the metal electrode layer.

4. The metal electrode according to claim 1, wherein

the metal electrode layer includes a plurality of microdomains neighboring each other on the substrate, and

the microdomains are so placed that the arranging direction of the openings in each microdomain is oriented at random.

5. A light-transmitting metal electrode comprising a metal electrode layer having a thickness of 10 to 200 nm, wherein

the metal electrode layer comprises:

a continuous metal part, any two points in the continuous metal part being continuously connected without breaks; and

a plurality of openings penetrating through the metal electrode layer and being arranged so that a distribution of the openings is represented by a radial distribution function curve having a half-width of 5 to 300 nm.

6. The light-transmitting metal electrode according to claim 5, wherein the metal electrode layer is made of a metal selected from a group consisting of aluminum, silver, platinum, nickel, and cobalt.

7. The light-transmitting metal electrode according to claim 5, wherein a light-transmittance of the light-transmitting metal electrode, at a wavelength of light incident to the light-transmitting metal electrode, is not smaller than a mean area ratio of the openings in the metal electrode layer.

8. The light-transmitting metal electrode according to claim 5, wherein

the metal electrode layer includes a plurality of microdomains neighboring each other, and

the microdomains are so placed that the arranging direction of the openings in each microdomain is oriented at random.

9. A light-transmitting metal electrode a substrate;

a metal electrode layer having a thickness of 10 to 200 nm and formed on the substrate, the metal electrode layer including a plurality of microdomains neighboring each other; and

grain boundaries bordering each of the plurality of microdomains, wherein each microdomain comprises;

a continuous metal part, any two points in the continuous metal part being continuously connected without breaks; and

a plurality of openings penetrating through the metal electrode layer and being arranged periodically along an arranging direction;

wherein the arranging directions of two neighboring microdomains are different from each other.

10. A light-transmitting metal electrode, comprising:

a substrate; and

a metal electrode layer having a thickness of 10 to 200 nm and formed on the substrate, the metal electrode layer including a plurality of microdomains neighboring each other,

wherein each microdomain comprises;

a continuous metal part, any two points in the continuous metal part being continuously connected without breaks; and

a plurality of openings penetrating through the metal electrode layer and being arranged periodically along an arranging direction;

wherein the arranging directions of two neighboring microdomains are different from each other; and

wherein a distribution of the openings is represented by a radial distribution function curve having a half-width of 5 to 300 nm.