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Multi-port mechanical resonating devices and related methods

  • US 8,686,614 B2
  • Filed: 12/16/2009
  • Issued: 04/01/2014
  • Est. Priority Date: 12/17/2008
  • Status: Active Grant
First Claim
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1. A device comprising:

  • a suspended mechanical resonating structure having a first surface and a second surface opposite the first surface;

    a substrate coupled to the suspended mechanical resonating structure such that ends of the suspended mechanical resonating structure are free;

    four electrical ports; and

    four electrodes formed on the first surface, each one of the four electrodes being coupled to a respective one of the four electrical ports,wherein the four electrical ports include two input ports configured as a differential input port and two output ports configured as a differential output port, andwherein the mechanical resonating structure is formed of multiple layers, the layers comprising;

    a first temperature compensating layer;

    a second temperature compensating layer;

    a conductive layer forming a conductive plane, wherein the conductive layer contacts the second temperature compensating layer; and

    an active layer comprising a piezoelectric material, wherein the active layer contacts the conductive layer,wherein the first and second temperature compensating layers compensate for temperature induced changes in a resonance frequency of the mechanical resonating structure,wherein at least one of the first and second temperature compensating layers comprises Silicon Dioxide, andwherein the piezoelectric material is Aluminum Nitride or Silicon.

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