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Method for manufacturing a micromechanical component, and micromechanical component

  • US 8,687,255 B2
  • Filed: 07/06/2009
  • Issued: 04/01/2014
  • Est. Priority Date: 08/12/2008
  • Status: Active Grant
First Claim
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1. A method for manufacturing a micromechanical component, comprising:

  • forming a first etch stop layer on a base substrate, the first etch stop layer being formed in such a way that it has a first pattern of through-cutouts;

    forming a first electrode-material layer on the first etch stop layer;

    forming a second etch stop layer on the first electrode-material layer, the second etch stop layer being formed in such a way that it has a second pattern of through-cutouts differing from the first pattern;

    forming a second electrode-material layer on the second etch stop layer;

    forming a patterned mask on the second electrode-material layer; and

    carrying out a first etching step in a first direction and a second etching step in a second direction counter to the first direction to etch at least one first electrode unit out of the first electrode-material layer, and to etch at least one second electrode unit out of the second electrode-material layer.

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