Operation monitoring system for processing apparatus
First Claim
1. An operation monitoring system for a processing apparatus, the processing apparatus comprising:
- moveable parts disposed to form a predetermined processing environment within a processing chamber in which a predetermined processing is performed on an object to be processed; and
a control means for controlling the operation of each of the moveable parts,the operation monitoring system having a vibration detection means for detecting waveforms of vibrations to be generated accompanied by the operation of the moveable parts,wherein, when control by the control means is performed to operate any one of the moveable parts, there are obtained;
event data corresponding to the control; and
waveforms of vibrations of all the moveable parts that are detected by the vibration detection means and that are moving simultaneously, andonly when any one of the movable parts corresponding to the event data is operated, the change in the waveform is monitored and, if the waveform has changed beyond a predetermined range, the processing apparatus is judged to be abnormal.
1 Assignment
0 Petitions
Accused Products
Abstract
In a processing apparatus having: moveable parts disposed to form a predetermined processing environment within a processing chamber in which a predetermined processing is performed on an object to be processed; and a control means for controlling the operation of each of the moveable parts, abnormality inclusive of deterioration with time of the moveable parts constituting the processing apparatus is made to be easily judged. There is provided a vibration detection means for detecting the waveforms of vibrations that occur accompanied by the operation of the moveable parts. When control is made from the control means in order to operate any one of the moveable parts, there are obtained event data corresponding to the control and the waveforms of vibrations of all the moveable parts that are operating simultaneously at the time in question. Each time the control corresponding to the event data is selected, or when a waveform of vibration corresponding to another event data of the same kind as that of the above-mentioned event data has been obtained, the change in the waveform is monitored. When the waveform has changed beyond a predetermined range, the processing apparatus is judged to be abnormal.
10 Citations
12 Claims
-
1. An operation monitoring system for a processing apparatus, the processing apparatus comprising:
-
moveable parts disposed to form a predetermined processing environment within a processing chamber in which a predetermined processing is performed on an object to be processed; and a control means for controlling the operation of each of the moveable parts, the operation monitoring system having a vibration detection means for detecting waveforms of vibrations to be generated accompanied by the operation of the moveable parts, wherein, when control by the control means is performed to operate any one of the moveable parts, there are obtained;
event data corresponding to the control; and
waveforms of vibrations of all the moveable parts that are detected by the vibration detection means and that are moving simultaneously, andonly when any one of the movable parts corresponding to the event data is operated, the change in the waveform is monitored and, if the waveform has changed beyond a predetermined range, the processing apparatus is judged to be abnormal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
-
Specification