Method of manufacturing a resonating structure
First Claim
Patent Images
1. A method, comprising:
- constructing a mechanical resonating structure by applying an active layer on a surface of a compensating structure, wherein the compensating structure comprises;
a first layer having a stiffness that adapts to a change in temperature over a first temperature range;
a third layer having a stiffness that adapts to a change in temperature over a second temperature range; and
a second layer between the first layer and the third layer; and
adjusting an operational profile of the mechanical resonating structure by adding one or more materials to at least a first portion of the mechanical resonating structure, removing one or more materials from at least a second portion of the mechanical resonating structure, or combinations thereof, wherein the operational profile comprises a measurement of at least one of a resonant frequency of the mechanical resonating structure, a profile of a temperature coefficient of frequency of the mechanical resonating structure, one or more temperatures for which the temperature coefficient of frequency of the mechanical resonating structure is approximately zero, or a temperature coefficient of stiffness of the mechanical resonating structure.
2 Assignments
0 Petitions
Accused Products
Abstract
Aspects of the subject disclosure include, for example, obtaining a mechanical resonating structure comprising a compensating structure, where the compensating structure comprises one or more materials having an adaptive stiffness that reduces a variance in a resonating frequency of the mechanical resonating structure (f0), and adjusting at least one of a value of f0 of the obtained mechanical resonating structure or a value of a temperature for which temperature coefficient of frequency of the obtained mechanical resonating structure is approximately zero (T0) by altering a thickness of at least one targetable material of the mechanical resonating structure. Other embodiments are disclosed.
-
Citations
22 Claims
-
1. A method, comprising:
-
constructing a mechanical resonating structure by applying an active layer on a surface of a compensating structure, wherein the compensating structure comprises; a first layer having a stiffness that adapts to a change in temperature over a first temperature range; a third layer having a stiffness that adapts to a change in temperature over a second temperature range; and a second layer between the first layer and the third layer; and adjusting an operational profile of the mechanical resonating structure by adding one or more materials to at least a first portion of the mechanical resonating structure, removing one or more materials from at least a second portion of the mechanical resonating structure, or combinations thereof, wherein the operational profile comprises a measurement of at least one of a resonant frequency of the mechanical resonating structure, a profile of a temperature coefficient of frequency of the mechanical resonating structure, one or more temperatures for which the temperature coefficient of frequency of the mechanical resonating structure is approximately zero, or a temperature coefficient of stiffness of the mechanical resonating structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
-
-
20. A method, comprising:
-
obtaining a mechanical resonating structure comprising a compensating structure, wherein the compensating structure comprises one or more materials having an adaptive stiffness that reduces a variance in a resonating frequency of the mechanical resonating structure (f0); adjusting at least one of a value of f0 of the obtained mechanical resonating structure or a value of a temperature for which temperature coefficient of frequency of the obtained mechanical resonating structure is approximately zero (T0) by altering a thickness of at least one targetable material of the mechanical resonating structure, wherein the at least one targetable material comprises a first portion of a first material having a first thickness and a second portion of a second material having a second thickness, wherein the first and second materials differ, and wherein the obtained mechanical resonating structure is constructed according to a desired ratio of a first surface area of the first portion and a second surface area of the second portion to enable selective adjustment of at least one of the value of f0 or the value of T0; detecting that at least one of the value of f0, the value of T0, or a thickness of at least one material layer of the mechanical resonating structure is offset from desired values for f0, T0 and material layer thicknesses of the mechanical resonating structure; and adjusting according to the detected offset at least one of the value of f0 or the value of T0 to approximate at least one of the desired values of f0 or T0 by altering at least one of the first thickness of at least a portion of the first material or the second thickness of at least a portion of the second material. - View Dependent Claims (21, 22)
-
Specification