High sensitivity mechanical gyro with reduced quadrature error
First Claim
1. A gyroscope comprising:
- a substrate comprising at least three layers stacked on top of one another in a y-direction, wherein each layer is either a drive spring layer or a sense spring layer, and wherein the total thickness of the drive spring layers in the y-direction exceeds the total thickness of the sense spring layers in the y-direction, and the drive spring layers and the sense spring layers are alternatingly and symmetrically disposed within the substrate;
a rigid support structure formed from the substrate;
a plurality of drive springs formed in each drive spring layer and designed to deflect only in an xz-plane that is perpendicular to the y-direction, wherein each drive spring is operatively coupled to the support structure;
a drive mass formed from at least one layer of the substrate, wherein the drive mass is coupled to the support structure via the drive springs such that movement of the drive mass with respect to the support structure is substantially restricted to movement in the xz-plane;
a drive mass driver operatively coupled to the drive mass and configured to cause movement of the drive mass in the xz-plane with respect to the support structure;
a plurality of sense springs formed in each sense spring layer and designed to deflect only in the y-direction, wherein each sense spring is operatively coupled to the drive mass; and
a sense mass formed from at least one layer, wherein the sense mass is coupled to the drive mass via the sense springs such that movement of the sense mass with respect to the drive mass is substantially restricted to movement in the y-direction.
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Accused Products
Abstract
A gyroscope comprising: a multi-layer substrate, comprising drive spring and sense spring layers; a rigid support structure formed from the substrate; a plurality of drive springs formed in each drive spring layer wherein each drive spring is operatively coupled to the support structure; a drive mass formed from at least one layer of the substrate, wherein the drive mass is coupled to the support structure via the drive springs; a drive mass driver operatively coupled to the drive mass and configured to cause movement of the drive mass with respect to the support structure; a plurality of sense springs formed in each sense spring layer, wherein each sense spring is operatively coupled to the drive mass; and a sense mass formed from at least one layer, wherein the sense mass is coupled to the drive mass via the sense springs.
26 Citations
19 Claims
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1. A gyroscope comprising:
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a substrate comprising at least three layers stacked on top of one another in a y-direction, wherein each layer is either a drive spring layer or a sense spring layer, and wherein the total thickness of the drive spring layers in the y-direction exceeds the total thickness of the sense spring layers in the y-direction, and the drive spring layers and the sense spring layers are alternatingly and symmetrically disposed within the substrate; a rigid support structure formed from the substrate; a plurality of drive springs formed in each drive spring layer and designed to deflect only in an xz-plane that is perpendicular to the y-direction, wherein each drive spring is operatively coupled to the support structure; a drive mass formed from at least one layer of the substrate, wherein the drive mass is coupled to the support structure via the drive springs such that movement of the drive mass with respect to the support structure is substantially restricted to movement in the xz-plane; a drive mass driver operatively coupled to the drive mass and configured to cause movement of the drive mass in the xz-plane with respect to the support structure; a plurality of sense springs formed in each sense spring layer and designed to deflect only in the y-direction, wherein each sense spring is operatively coupled to the drive mass; and a sense mass formed from at least one layer, wherein the sense mass is coupled to the drive mass via the sense springs such that movement of the sense mass with respect to the drive mass is substantially restricted to movement in the y-direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A gyroscope comprising:
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a three-layer silicon substrate comprising a top layer, a middle layer, and a bottom layer that is substantially identical to the top layer, wherein the three layers are stacked and bonded to each other in a y-direction with a thermal and electrical isolating film between each layer, wherein the thickness of the middle layer in the y-direction exceeds the combined thickness of the top and bottom layers in the y-direction, and wherein the substrate further comprises; a rigid support structure formed out of all three substrate layers; a plurality of drive spring members formed out of the middle layer, wherein a first end of each drive spring member is coupled to the rigid support structure; a drive mass formed out of all three substrate layers, wherein the drive mass is coupled to a second end of each drive spring member such that movement of the drive mass with respect to the support structure is substantially restricted to movement only in an x-direction; a drive mass driver formed out of the substrate and operatively coupled to the support structure and the drive mass, wherein the drive mass driver is configured to cause sinusoidal oscillation of the drive mass in the x-direction; a plurality of sense spring members formed out of the top and bottom layers, wherein a first end of each sense spring member is coupled to the drive mass; and a sense mass formed out of all three substrate layers and coupled to a second end of each sense spring member such that movement of the sense mass is substantially restricted to movement only in a y-direction. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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Specification