Micromechanical system
First Claim
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1. A micromechanical sensor, comprising:
- a substrate;
a first movable element connected to the substrate by a first spring element; and
a second movable element connected to the substrate by a second spring element;
wherein the first movable element and the second movable element are independently movable in relation to the substrate, and wherein the first movable element and the second movable element are situated one above the other perpendicular to the substrate surface in at least some sections;
wherein the first spring element is a torsional spring and the second spring element is a spiral spring.
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Abstract
A micromechanical system includes a first movable element, which is connected to a substrate via a first spring element, and a second movable element, which is connected to the substrate via a second spring element. The first movable element and the second movable element are movable in relation to the substrate independent of one another. Furthermore, the first movable element and the second movable element are situated one above the other in at least some sections in a direction perpendicular to the substrate surface.
17 Citations
5 Claims
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1. A micromechanical sensor, comprising:
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a substrate; a first movable element connected to the substrate by a first spring element; and a second movable element connected to the substrate by a second spring element; wherein the first movable element and the second movable element are independently movable in relation to the substrate, and wherein the first movable element and the second movable element are situated one above the other perpendicular to the substrate surface in at least some sections; wherein the first spring element is a torsional spring and the second spring element is a spiral spring. - View Dependent Claims (2, 3, 4, 5)
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Specification