Electron microscope device

• US 8,692,194 B2
• Filed: 06/21/2011
• Issued: 04/08/2014
• Est. Priority Date: 06/24/2010
• Status: Active Grant

• Current Assignee: Horiba Limited
• Original Assignee: Horiba Limited
• Inventors: Isozaki, Hisashi, Tanaka, Hirotaka
• Primary Examiner(s): Vanore, David A
• Assistant Examiner(s): STOFFA, WYATT A
• Application Number:
  US13/165,046
• Publication Number:
  US 20110315877A1
• Time in Patent Office: 1,022 Days
• Field of Search: 250310-311
• US Class Current: 250/310
• CPC Class Codes: H01J 2237/2443 Scintillation detectors
• CPC Class Codes: H01J 2237/2482 Optical means
• CPC Class Codes: H01J 37/226 Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
• CPC Class Codes: H01J 37/228 whereby illumination or light collection take place in the same area of the discharge
• CPC Class Codes: H01J 37/244 Detectors; Associated components or circuits therefor
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

The present invention provides an electron microscope device, comprising a scanning electron microscope 2 and an optical microscope 3, wherein the scanning electron microscope has scanning means 10 for scanning an electron beam and an electron detector 12 for detecting electron 11 issued from a specimen 8 scanned over by the electron beam, and the scanning electron microscope acquires a scanning electron image based on a detection result from the electron detector, the optical microscope has a light emitting source 13 for illuminating an illumination light, and the optical microscope illuminates the illumination light to the specimen, and acquires an optical image by receiving a reflection light from the specimen, and wherein the electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter for restricting so that all or almost all of wavelength ranges of the fluorescent light from the fluorescent substance layer passes through, and a wavelength detecting element for receiving the fluorescent light passing through the wavelength filter and performing optical-electric conversion, wherein the light amount of the illumination light in the wavelength range passing through the wavelength filter does not exceed a limit of deterioration of the scanning electron image.

Claims

1. An electron microscope device, comprising a scanning electron microscope and an optical microscope, wherein said scanning electron microscope has a scanner and an electron detector for detecting electrons issued from a specimen scanned over by an electron beam, and said scanning electron microscope acquires a scanning electron image based on a detection result from said electron detector, and said optical microscope has a light emitting source for illuminating an illumination light, and said optical microscope illuminates said illumination light to said specimen, and acquires an optical image by receiving a reflection light from said specimen, and wherein said electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter having a transmission wavelength range and a non-transmission wavelength range for restricting so that all or almost all of wavelength ranges of the fluorescent light from said fluorescent substance layer passes through, and a wavelength detecting element for receiving said fluorescent light passing through said wavelength filter and performing optical-electric conversion, wherein said illumination light includes a wavelength range that passes through said wavelength filter and wherein the light amount of said wavelength range does not exceed a limit of deterioration of said scanning electron image, thereby allowing simultaneous use of said illumination light and said electron beam, wherein said light emitting source is an LED, and said LED has a light emission property wherein light intensity of a frequency spectrum included in the transmission wavelength range of said wavelength filter is lower than light intensity of a frequency spectrum included in said non-transmission wavelength range.

2. The electron microscope device according to claim 1, further comprising an interferometer for projecting an interference light to a surface of said specimen and for detecting a position in height direction of said specimen by using reflection of said interference light from the surface of said specimen, wherein said interference light has a wavelength different from the transmission wavelength range of said wavelength filter.

3. The electron microscope device according to claim 1, further comprising a foreign object detecting device comprising an examination light which is projected toward a surface of said specimen, and an interferometer for projecting an interference light to the surface of said specimen and for detecting a position in height direction of said specimen by using reflection of said interference light from the surface of said specimen, wherein said examination light and said interference light have wavelengths different from the transmission wavelength range of said wavelength filter, and said examination light and said interference light have wavelength ranges different from each other.

8. The electron microscope device according to claim 1, further comprising a foreign object detecting device, comprising an examination light which is projected toward a surface of said specimen, wherein said examination light is designed to have a wavelength different from the transmission wavelength range of said wavelength filter.

4. An electron microscope device, comprising a scanning electron microscope and an optical microscope, wherein said scanning electron microscope has a scanner and an electron detector for detecting electrons issued from a specimen scanned over by an electron beam, and said scanning electron microscope acquires a scanning electron image based on a detection result from said electron detector, and said optical microscope has a light emitting source for illuminating an illumination light, and said optical microscope illuminates said illumination light to said specimen, and acquires an optical image by receiving a reflection light from said specimen, and wherein said electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter having a transmission wavelength range and a non-transmission wavelength range for restricting so that all or almost all of wavelength ranges of the fluorescent light from said fluorescent substance layer passes through, and a wavelength detecting element for receiving said fluorescent light passing through said wavelength filter and performing optical-electric conversion, wherein said illumination light includes a wavelength range that passes through said wavelength filter and wherein the light amount of said wavelength range does not exceed a limit of deterioration of said scanning electron image, thereby allowing simultaneous use of said illumination light and said electron beam, wherein an illumination light optical system of said optical microscope has a wavelength selective filter for illumination, said light emitting source illuminates said illumination light including a wavelength of a visible light range, and said wavelength selective filter for illumination restricts transmissivity of a wavelength corresponding to the transmission wavelength range of said wavelength filter and allows a wavelength corresponding to the non-transmission wavelength range of said wavelength filter to pass.

5. An electron microscope device, comprising a scanning electron microscope and an optical microscope, wherein said scanning electron microscope has a scanner and an electron detector for detecting electrons issued from a specimen scanned over by an electron beam, and said scanning electron microscope acquires a scanning electron image based on a detection result from said electron detector, and said optical microscope has a light emitting source for illuminating an illumination light, and said optical microscope illuminates said illumination light to said specimen, and acquires an optical image by receiving a reflection light from said specimen, and wherein said electron detector has a fluorescent substance layer for electron-light conversion, a wavelength filter having a transmission wavelength range and a non-transmission wavelength range for restricting so that all or almost all of wavelength ranges of the fluorescent light from said fluorescent substance layer passes through, and a wavelength detecting element for receiving said fluorescent light passing through said wavelength filter and performing optical-electric conversion, wherein said illumination light includes a wavelength range that passes through said wavelength filter and wherein the light amount of said wavelength range does not exceed a limit of deterioration of said scanning electron image, thereby allowing simultaneous use of said illumination light and said electron beam, wherein an illumination light optical system of said optical microscope has a wavelength selective filter for illumination, said light emitting source is an LED, and said wavelength selective filter for illumination restricts transmissivity of a wavelength corresponding to the transmission wavelength range of said wavelength filter and allows a wavelength corresponding to the non-transmission wavelength range of said wavelength filter to pass.

6. The electron microscope device according to claim 5, wherein said light emitting source is an LED, and said LED has a light emission property wherein light amount of the transmission wavelength range of said wavelength filter is higher than light amount of the non-transmission wavelength range.

7. The electron microscope device according to claim 5, comprising a control unit, wherein said control unit amplifies and adjusts a color tone with respect to a wavelength band passing through said wavelength selective filter for illumination among wavelength ranges of optical images acquired by said optical microscope.