Heated rotary seal and bearing for chilled ion implantation system

• US 8,692,215 B2
• Filed: 05/26/2011
• Issued: 04/08/2014
• Est. Priority Date: 05/28/2010
• Status: Active Grant

• Current Assignee: Axcelis Technologies Incorporated
• Original Assignee: Axcelis Technologies Incorporated
• Inventors: Lee, William D., DiVergilio, William, Drummond, Steve
• Primary Examiner(s): Kim, Robert
• Assistant Examiner(s): Smith, David E
• Application Number:
  US13/116,661
• Publication Number:
  US 20110291023A1
• Time in Patent Office: 1,048 Days
• Field of Search: 250/492.2, 250/492.21, 250/492.3, 384/476
• US Class Current: 250/492.21
• CPC Class Codes: H01J 2237/166 Sealing means
• CPC Class Codes: H01J 2237/2001 Maintaining constant desired temperature
• CPC Class Codes: H01J 2237/20214 Rotation
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support introducing the objects H01J37/18
• CPC Class Codes: H01J 37/3171 for ion implantation plasma immersion ion implantation H01J37/32412

Abstract

A workpiece scanning system is provided having a scan arm that rotates about a first axis and a chilled end effector rotatably coupled to the scan arm about a second axis for selectively securing a workpiece. The chilled end effector has a clamping plate and one or more cooling mechanisms for cooling the clamping plate. A bearing is positioned along the second axis and rotatably couples the end effector to the scan arm, and a seal is positioned along the second axis to provide a pressure barrier between an external environment and an internal environment. One or more of the bearing and seal can have a ferrofluid associated therewith. A heater assembly is positioned proximate to the bearing and seal, wherein the heater assembly selectively provides a predetermined amount of heat to the bearing and seal, therein increasing a propensity of the end effector to rotate about the second axis.

Claims

1. An ion implantation workpiece scanning system, comprising:

a scan arm configured to rotate about a first axis;

a chilled end effector rotatably coupled to the scan arm and configured to selectively secure a workpiece, wherein the chilled end effector is further configured to rotate about a second axis, wherein the first axis and second axis are positioned a predetermined distance apart, and wherein the chilled end effector comprises a clamping plate and one or more cooling mechanisms configured to cool the clamping plate;

a bearing positioned along the second axis, wherein the bearing rotatably couples the end effector to the scan arm;

a seal positioned along the second axis, wherein the seal generally provides a pressure barrier between an external environment and an internal environment associated with an internal region of one or more of the scan arm and end effector, wherein the seal comprises a magnetic liquid rotary seal assembly configured to provide a rotary, hermetic seal between the external environment and internal environment, and wherein the magnetic liquid rotary seal assembly further comprises a motor comprising;

a rotor operably coupled to the chilled end effector and configured to rotate about the second axis;

a stator positioned along the second axis and configured to rotate the rotor; and

a ferrofluid disposed in an annular region between the rotor and stator, therein forming the seal; and

a heater assembly positioned proximate to the bearing and seal, wherein the heater assembly is configured to selectively provide a predetermined amount of heat to the bearing and seal, therein increasing a propensity of the end effector to rotate about the second axis.

2. The ion implantation workpiece scanning system of claim 1, wherein the heater assembly comprises an electric element having a heating power range of approximately 100 to 200 watts.

3. The ion implantation workpiece scanning system of claim 1, wherein the heater assembly comprises one or more fluid passages configured to circulate a heating fluid therethrough.

4. The ion implantation workpiece scanning system of claim 1, wherein the chilled end effector further comprises a chilled electrostatic chuck configured to selectively electrostatically clamp the workpiece to a clamping surface thereof.

5. The ion implantation workpiece scanning system of claim 1, wherein the first axis and second axis are parallel to one another.

6. The ion implantation workpiece scanning system of claim 1, wherein the one or more cooling mechanisms comprise one or more fluid channels configured to circulate a cooling fluid to the clamping plate.

7. An ion implantation workpiece scanning system, comprising:

a scan arm configured to translate a workpiece across an ion beam;

an end effector rotatably coupled to the scan arm and configured to selectively secure a workpiece, wherein the end effector is further configured to rotate about a twist axis, a bearing positioned along the twist axis, wherein the bearing rotatably couples the end effector to the scan arm;

a seal positioned along the twist axis, wherein the seal generally provides a pressure barrier between an external environment and an internal environment associated with an internal region of one or more of the scan arm and end effector, and wherein the seal comprises a magnetic liquid rotary seal assembly configured to provide a rotary, hermetic seal between the external environment and internal environment, wherein the magnetic liquid rotary seal assembly further comprises a motor comprising;

a rotor operably coupled to the end effector and configured to rotate about the twist axis;

a stator positioned along the twist axis and configured to rotate the rotor; and

a ferrofluid disposed in an annular region between the rotor and stator, therein forming the seal; and

a heater assembly positioned proximate to the bearing and seal, wherein the heater assembly is configured to selectively provide a predetermined amount of heat to the bearing and seal, therein increasing a propensity of the end effector to rotate about the twist axis.

8. The ion implantation workpiece scanning system of claim 7, wherein the heater assembly comprises an electric element having a heating power in the range of 100 to 200 watts.

9. The ion implantation workpiece scanning system of claim 7, wherein the heater assembly comprises one or more fluid passages configured to circulate a heating fluid therethrough.

10. The ion implantation workpiece scanning system of claim 7, wherein the end effector further comprises a chilled electrostatic chuck configured to selectively electrostatically clamp the workpiece to a clamping surface thereof.

11. An ion implantation workpiece scanning system, comprising:

a chilled end effector rotatably coupled to the scan system and configured to selectively secure a workpiece, wherein the chilled end effector is further configured to rotate about an axis, wherein the chilled end effector comprises a clamping plate and one or more cooling mechanisms configured to cool the clamping plate;

a bearing positioned along the axis, wherein the bearing rotatably couples the chilled end effector to the scan system;

a seal positioned along the axis, wherein the seal generally provides a pressure barrier between an external environment and an internal environment associated with an internal region of one or more of the scan arm and chilled end effector, and wherein the seal comprises a magnetic liquid rotary seal assembly configured to provide a rotary, hermetic seal between the external environment and internal environment, wherein the magnetic liquid rotary seal assembly further comprises a motor comprising;

a rotor operably coupled to the chilled end effector and configured to rotate about the axis;

a stator positioned along the axis and configured to rotate the rotator; and

a ferrofluid disposed in an annular region between the rotor and stator, therein forming the seal; and

a heater assembly positioned proximate to the bearing and seal, wherein the heater assembly is configured to selectively provide a predetermined amount of heat to the bearing and seal, thereby increasing a propensity of the chilled end effector to rotate about the axis.

12. The ion implantation workpiece scanning system of claim 11, wherein the heater assembly comprises an electric element having a heating power in the range of approximately 100 to 200 watts.

13. The ion implantation workpiece scanning system of claim 11, wherein the heater assembly comprises one or more fluid passages configured to circulate a heating fluid therethrough.

14. The ion implantation workpiece scanning system of claim 11, wherein the chilled end effector further comprises a chilled electrostatic chuck configured to selectively electrostatically clamp the workpiece to a clamping surface thereof.

15. A method for maintaining a rotational capacity of a chilled end effector, the method comprising:

providing a chilled end effector configured to rotate about an axis, wherein the chilled end effector comprises a clamping plate and one or more cooling mechanisms configured to cool the clamping plate;

creating a pressure barrier between an external environment and an internal environment associated with an internal region of the chilled end effector via a magnetic liquid rotary seal assembly positioned along the axis, wherein the magnetic liquid rotary seal assembly provides a rotary, hermetic seal between the external environment and internal environment via a ferrofluid disposed in an annular region between a rotor and a stator of a motor;

heating the magnetic liquid rotary seal assembly; and

controlling the heating to selectively provide a predetermined amount of heat to the magnetic liquid rotary seal assembly, thereby increasing a propensity of the chilled end effector to rotate about the axis.