MEMS acoustic sensor with integrated back cavity
First Claim
1. A MEMS device comprising;
- an anchor attached to a first substrate;
a first plate with a first surface and a second surface;
a second plate with a third surface and a fourth surface, attached to the first plate; and
a linkage connecting the anchor to the first plate, where the first plate and second plate are displaced in the presence of an acoustic pressure differential between the first and second surfaces of the first plate;
wherein the first plate, the second plate, the linkage, and the anchor are contained in an enclosure formed by the first substrate and a second substrate;
wherein one of the first and second substrates contains an acoustic port to expose the first surface to the environment,wherein at least one electrode is formed on the first substrate.
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Accused Products
Abstract
A MEMS device is disclosed. The MEMS device comprises a first plate with a first surface and a second surface; and an anchor attached to a first substrate. The MEMS device further includes a second plate with a third surface and a fourth surface attached to the first plate. A linkage connects the anchor to the first plate, wherein the first plate and second plate are displaced in the presence of an acoustic pressure differential between the first and second surfaces of the first plate. The first plate, second plate, linkage, and anchor are all contained in an enclosure formed by the first substrate and a second substrate, wherein one of the first and second substrates contains a through opening to expose the first surface of the first plate to the environment.
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Citations
23 Claims
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1. A MEMS device comprising;
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an anchor attached to a first substrate; a first plate with a first surface and a second surface; a second plate with a third surface and a fourth surface, attached to the first plate; and a linkage connecting the anchor to the first plate, where the first plate and second plate are displaced in the presence of an acoustic pressure differential between the first and second surfaces of the first plate; wherein the first plate, the second plate, the linkage, and the anchor are contained in an enclosure formed by the first substrate and a second substrate; wherein one of the first and second substrates contains an acoustic port to expose the first surface to the environment, wherein at least one electrode is formed on the first substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification