Interferometric modulator in transmission mode

• US 8,693,084 B2
• Filed: 04/27/2012
• Issued: 04/08/2014
• Est. Priority Date: 03/07/2008
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Ganti, Surya, Khazeni, Kasra, Sampsell, Jeff
• Primary Examiner(s): HASAN, MOHAMMED A
• Application Number:
  US13/458,215
• Publication Number:
  US 20120212795A1
• Time in Patent Office: 711 Days
• Field of Search: 359290-298, 359/318
• US Class Current: 359/291
• CPC Class Codes: G02B 26/001 based on interference in an adjustable optical cavity interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26

Abstract

A transmissive micromechanical device includes a substrate, an optical stack over the substrate and a moveable membrane over the optical stack. The moveable membrane may include a partially reflective mirror and be configured to move from a first position to a second position. When the movable membrane is in the first position the transmissive micromechanical device is configured to pass light of a predetermined color and when the movable membrane is in the second position, the micromechanical device is configured to block substantially all of light incident on the substrate.

Claims

1. A device, comprising:

a movable membrane including a partially reflective mirror, the movable membrane configured to move from a first position to a second position; and

a substrate positioned on a first side of the movable membrane;

wherein with the movable membrane in the first position visible light of a desired wavelength range incident on a second side of the movable membrane passes through the movable membrane and through the substrate, and

wherein with the movable membrane in the second position substantially all of the visible light of the desired wavelength range is blocked.

2. The device of claim 1, wherein with the movable membrane in the second position at least 90% of visible light incident on the second side of the movable membrane is blocked.

3. The device of claim 1, wherein with the movable membrane in the second position the movable membrane defines at least in part an optical interference cavity configured to pass light of desired wavelengths, and wherein the movable membrane includes an absorber layer configured to absorb light of other wavelengths.

4. The device of claim 3, wherein the absorber layer includes a semiconductor.

5. The device of claim 1 further comprising a mechanical layer including a dielectric material.

6. The device of claim 5, wherein the dielectric material comprises at least one of silicon nitride (“

SiN”

) or silicon dioxide (“

SiO₂”

).

7. The device of claim 5 further comprising a thin layer of a metal disposed on top of the dielectric material.

8. The device of claim 7, wherein the thin layer of metal comprises at least one of gold (“

Au”

) or silver (“

Ag”

).

9. The device of claim 1, wherein the partially reflective mirror includes a flexible, silver-coated membrane.

10. The device of claim 1 further comprising a lens configured to focus light passing through the movable membrane and the substrate.

11. A transmissive mechanical device, comprising a first optical stack separated by a gap from a second optical stack, wherein the first optical stack includes at least one material with an index of refraction greater than 2.0 and at least one material with an index of refraction less than 1.3, and wherein the second optical stack includes a glass substrate, at least one material with an index of refraction greater than 2.0 and at least one material with an index of refraction less than 1.3.

12. The transmissive mechanical device of claim 11, wherein within either the first optical stack or the second optical stack a first material having a higher relative index of refraction is positioned so as to sandwich a second material having a lower relative index of refraction.

13. The transmissive mechanical device of claim 12, wherein a difference between the index of refraction of the sandwiching layers and the middle layer is maximized.

14. The transmissive mechanical device of claim 13, wherein at least one layer includes a dielectric or a semiconductor.

15. The transmissive mechanical device of claim 13, wherein the thickness of each layer is greater than 25% of the wavelength of light incident on the substrate.

16. A transmissive display, comprising:

a transparent substrate;

a first reflecting layer disposed on the transparent substrate; and

a movable membrane including a second reflecting layer, wherein the second reflecting layer and the first reflecting layer form a variable optical cavity,

wherein the variable optical cavity is adjusted as the movable membrane moves from a first position to a second position, and

wherein when the movable membrane is in the first position, the movable membrane allows transmission of wavelengths of light in the range of ultraviolet or infrared light to pass through the transparent substrate, and absorbs substantially the entire wavelength range of visible light incident on the movable membrane.

17. The display of claim 16, wherein the first reflecting layer includes a material with an index of refraction greater than 2.0.

18. The display of claim 16, wherein the first reflecting layer comprises at least one of gold (“

Au”

), silver (“

Ag”

) or silicon carbide (“

SiC”

).

19. The display of claim 16, wherein the entire wavelength of incident light is a particular wavelength.

20. The display of claim 16, wherein when the movable membrane is in the first position at approximately 300 nm a peak transmission is approximately 650 nm.

21. The display of claim 16, wherein when the movable membrane is in the second position a peak transmission is approximately 450 nm.

22. The display of claim 16 further comprising a linear polarizer, an optical isolator or a lens configured to focus light exiting the movable membrane.

23. The display of claim 22, wherein the lens is configured to focus light onto a pixel.

24. The display of claim 22, wherein the lens includes an array of lenses.

25. A device, comprising:

a substrate; and

a movable membrane positioned on a first side of the substrate, the movable membrane comprising a partially reflective mirror, and the movable membrane configured to move from a first position to a second position,

wherein with the movable membrane in the first position visible light of a desired wavelength range passes through the second side of the substrate and through the movable membrane, and

wherein with the movable membrane in the second position substantially all of the visible light of the desired wavelength range is blocked.

26. The device of claim 25, wherein with the movable membrane in the second position at least 90% of light incident on the second side of the substrate is blocked.

27. The device of claim 25, wherein with the movable membrane in the second position the movable membrane defines at least in part an optical interference cavity configured to pass light of predetermined wavelengths;

and wherein the movable membrane comprises an absorber layer configured to absorb light of other wavelengths.

28. The device of claim 27, wherein the absorber layer comprises a semiconductor.

29. The device of claim 25 further comprising a mechanical layer comprising a dielectric material.

30. The device of claim 29, wherein the dielectric material comprises silicon nitride (“

SiN”

) or silicon dioxide (“

SiO₂”

).

31. The device of claim 29 further comprising a thin layer of a metal disposed on top of the dielectric material.

32. The device of claim 31, wherein the thin layer of metal comprises gold (“

Au”

) or silver (“

Ag”

).

33. The device of claim 25, wherein the partially reflective mirror comprises a flexible, silver-coated membrane.

34. The device of claim 25 further comprising a lens configured to focus light passing through the substrate and the movable membrane.

35. A transmissive display, comprising:

a transparent substrate;

a first reflecting layer disposed on a first surface of the transparent substrate;

a movable membrane comprising a second reflecting layer, wherein the second reflecting layer and the first reflecting layer form a variable optical cavity; and

wherein the variable optical cavity is adjusted as the movable membrane moves from a first position to a second position, and

wherein when the movable membrane is in the first position, the movable membrane allows transmission of wavelengths of light passing through the substrate in the range of ultraviolet or infrared light, and absorbs substantially the entire wavelength range of incident visible light.

36. The display of claim 35, wherein the first reflecting layer comprises a material with an index of refraction greater than 2.0.

37. The display of claim 35, wherein the first reflecting layer comprises gold (“

Au”

), silver (“

Ag”

) or silicon carbide (“

SiC”

).

38. The display of claim 35, wherein the entire wavelength of incident light is a particular wavelength.

39. The display of claim 35, wherein when the movable membrane is in the first position at approximately 300 nm a peak transmission is approximately 650 nm.

40. The display of claim 35, wherein when the movable membrane is in the second position a peak transmission is approximately 450 nm.

41. The display of claim 35 further comprising a linear polarizer, an optical isolator, or a lens configured to focus light exiting the movable membrane.

42. The display of claim 41, wherein the lens is configured to focus light onto a pixel.

43. The display of claim 41, wherein the lens comprises an array of lenses.