×

Integrated IR source and acoustic detector for photoacoustic gas sensor

  • US 8,695,402 B2
  • Filed: 06/03/2010
  • Issued: 04/15/2014
  • Est. Priority Date: 06/03/2010
  • Status: Active Grant
First Claim
Patent Images

1. A photoacoustic gas sensor component comprising:

  • an infrared source;

    an integrated microphone;

    an infrared wavelength selective bandpass filter, wherein the infrared source, the integrated microphone, and the infrared wavelength selective bandpass filter are integrated into a single hermetically sealed package;

    an internal baffle structure within the hermetically sealed package that prevents radiation from the infrared source from coupling directly to the integrated microphone; and

    a gas measurement cell fitted on a single end of the hermetically sealed package wherein the infrared wavelength selective bandpass filter forms a window between a gas measurement volume of the gas measurement cell and the infrared source within the hermetically sealed package and wherein the gas measurement volume is communicatively coupled to the integrated microphone though an opening in a face of the hermetically sealed package.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×