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Micro-electromechanical system device having electrical insulating structure and manufacturing methods

  • US 8,695,426 B2
  • Filed: 08/29/2011
  • Issued: 04/15/2014
  • Est. Priority Date: 12/23/2010
  • Status: Active Grant
First Claim
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1. A micro-electromechanical system (MEMS) device, comprising:

  • at least one moving part;

    at least one anchor having a first conductive pillar;

    at least one spring connected to the at least one anchor and to the at least one moving part; and

    an insulating layer disposed in the at least one moving part and the at least one anchor, wherein each of the at least one moving part is divided into a first conductive portion and a second conductive portion by the insulating layer, the at least one anchor is divided into a first conductive portion and a second conductive portion by the insulating layer, the first conductive pillar connects the first conductive portion and the second conductive portion respectively.

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