Microfabricated elastomeric valve and pump systems
First Claim
1. A microfabricated elastomeric device comprising:
- a base layer;
a first elastomeric layer having a top surface and a bottom surface,wherein the bottom surface of the first elastomeric layer is bonded to the base layer;
wherein the bottom surface comprises a first recess such that the first recess and the base layer form a first flow channel,wherein the first elastomeric layer comprises a first via extending from the bottom surface to the top surface of the first elastomeric layer and disposed within the first elastomeric layer on a first side of the first recess, andwherein the first elastomeric layer comprises a second via extending from the bottom surface to the top surface of the first elastomeric layer and disposed within the first elastomeric layer on a second side of the first recess; and
a second elastomeric layer having a top surface and a bottom surface,wherein the bottom surface of the second elastomeric layer is bonded to the top surface of the first elastomeric layer, andwherein the bottom surface of the second elastomeric layer comprises a second recess such that the second recess, the top surface of the first elastomeric layer, the first via, and the second via form a second flow channel.
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Accused Products
Abstract
A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
181 Citations
8 Claims
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1. A microfabricated elastomeric device comprising:
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a base layer; a first elastomeric layer having a top surface and a bottom surface, wherein the bottom surface of the first elastomeric layer is bonded to the base layer; wherein the bottom surface comprises a first recess such that the first recess and the base layer form a first flow channel, wherein the first elastomeric layer comprises a first via extending from the bottom surface to the top surface of the first elastomeric layer and disposed within the first elastomeric layer on a first side of the first recess, and wherein the first elastomeric layer comprises a second via extending from the bottom surface to the top surface of the first elastomeric layer and disposed within the first elastomeric layer on a second side of the first recess; and a second elastomeric layer having a top surface and a bottom surface, wherein the bottom surface of the second elastomeric layer is bonded to the top surface of the first elastomeric layer, and wherein the bottom surface of the second elastomeric layer comprises a second recess such that the second recess, the top surface of the first elastomeric layer, the first via, and the second via form a second flow channel. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification